IDX-OM-W035

3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz

Series SY100 3 Port Solenoid Valve Rubber Seal

Other dimensions are same as grommet style. 2.1-8 Series SY100 Base Mounted (With Sub-plate) Grommet (G), (H): SY1 4 (A)-l ll-M3 1 2 G H 15.6 Monual override (Indicator light and surge voltage suppressor) 9 5 SY + 13 15.5 SYJ P VK 2-2.6 (Mounting holes) 13 3 28 (In case of DC) VZ 34.5 (In case of AC) VT VT G: 300 H: 600 (Lead wire length) G, H: 26.1 Gl, Hl: 26.8 (In case of DC) VP 10 VG VP

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 4 x M20 x 2.5 4 x M22 x 2.5 20 (3/4B) 0 250 73 330 177 80 57 8.7 108 135 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 80 57 12.2 105 150 4 x M10 x 1.5 18 40 (1 1/2B) 50 (2B) 0 60 448 94 540 354 92 65 18.1 120 160 4 x M12 x 1.75 22 65 (2 1/2B) 25 40 504 119 615 385

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33

RSH

4 !3 @0 !7 o !6 i @7 !9 #9 @1 @9 #2 @6 @4 !0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

modular-press-e

6 5/32 1/4 Symbol C4 C6 N3 N7 Option Fitting assembly G The right reference Description None Oil-free Symbol Nil X17 ARM10 Straight type ARM10F Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y

Modular F.R.L. Pressure Control Equipment

6 5/32 1/4 Symbol C4 C6 N3 N7 Option Fitting assembly G The right reference Description None Oil-free Symbol Nil X17 ARM10 Straight type ARM10F Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y

MXF

6 5.5 6.5 25 H Data 9.8 4-M4 x 0.7 A Section AA M 10 Operating port 2-M5 x 0.8 (Table length) 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5 H 25 3H9 depth 3 +0.025 0 23 4 3H9 depth 3 +0.025 0 (mm) Z M J I H N ZZ Model MXF12-20 65 65 36 11 22 4 76 MXF12-30 75 75 45 12 30 4 86 MXF12-50 111 111 80 13 65 6 122 8-6-11 12 Series MXF Dimensions: MXF16 Stroke adjuster at

ML1C

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Valve seal (Maintenance part) 4.

HEC_W-E

LABEL -4-2 FIG. 4-3 OUTSIDE DRAWINGS OF HEC006 -4-3 FIG. 4-4 OUTSIDE DRAWINGS OF HEC012 -4-4 FIG. 4-5 CONSTRUCTION AND PRINCIPLE OF THERMO MODULE -4-5 FIG. 4-6 RECIRCULATING FLUID AND RADIATING WATER CIRCUIT -4-6 FIG. 4-7 ELECTRICAL DIAGRAM (HEC006) -4-7 FIG. 4-8 ELECTRICAL DIAGRAM (HEC012) -4-8 FIG. 5-1 COMPONENTS OF HEC006 -5-1 FIG. 5-2 COMPONENTS OF HEC012 -5-2 FIG. 5-3 OPERATION PANEL

Ionizer

When the ionizer and feedback sensor are connected, the sensing DC mode is automatically selected. 4) Maintenance detection level setting Select the detection level of the maintenance period of the emitter with the maintenance detection level selection switch. Set the switch to either H (High), M (Middle), L (Low).

Residual Pressure Release Valve

button guard Rc thread with a push button guard Rc thread with a push button guard: KEC D Residual pressure release push button (Red) Body (Red) L1 Q D A B H Multi-holder (TMA series) for fixing the KE series Refer to page 531 for details. 8 4.2 Connection thread W L2 L2 (mm) Symbol W H Width across flats Model Connection thread Rc 1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89

Transfer

6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

C95Series

Variations JISSymbol r---r::==,..,-, [~jH+H+H+H+H 1"1 1 JISSymboi 10 -at 1~ II I I I I[ I I I I I I I1 I1~ Ie [~ I I I I I I I I I I I I I I I M~ JISSymbol __ rad ~ IeICIIK . Note) Standard sttllke for C95 9Elrles 1 5 below 700 I Without auto switch capability With auto switch capability Buill-in magnetT Made 10 order 2 pes.

COQ2BP

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread