AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

HRX-OM-R016

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

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s' i20mh) w'Bool CPA1TN ROD BOOT with Boof BORE B D E J K MM P s dTDeB TT TX TY TZ H z zz h zl 1 3 4 (351 2 7 6 2.O5 152\ o.79 1.57 0 3 9 i10l 067 117\ M8x1.25 0.28 (7\ M16x1.5 1 1 4 (30) 3.54 i90l o 5e 8;tjj (15 3,'* 1 . 1 4 (30) g 7 (95t 2.99 5.31 t135) 2.24 (581 (1031 6.06 (1541 2.05 (521 11.2) 260 (66) s T o 1 1 1 1 6 3 8 1.38 l35l 3 3 5 (85) 2.52 (64) 0.79 (2Ol 1.57 0.39 0.67 t17l 0

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

HRX-OM-S004

2.3 Function of Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

HRX-OM-W032

Set temperature 40.0 oC (104.0 oF) (-)2 5.0 to 55.0 oC (41.0 to 131.0 oF) Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G E (g6) F (h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 14 1 19.5 29 22 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0 0.043 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 5 12 21.2 18 1.5 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 6 14 1.5 34.5 25 20 42 17 10 0.5

NCRAI seies

ltil q{ry 30 (1 3/16) RailTyps DA7 o NCDBA!8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Multistage Ejector Series ZL112/212 1

characteristics 3% F .S. or less Repeatability 1% F .S. or less Operating voltage 12 to 24 VDC (Ripple 10% or less ) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 mA or less 45 mA or less 26, 27: 50 mA or less 67: 60 mA or less Current consumption Pressure indication

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

Residual Pressure Release Valve

button guard Rc thread with a push button guard Rc thread with a push button guard: KEC D Residual pressure release push button (Red) Body (Red) L1 Q D A B H Multi-holder (TMA series) for fixing the KE series Refer to page 531 for details. 8 4.2 Connection thread W L2 L2 (mm) Symbol W H Width across flats Model Connection thread Rc 1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89

NCA1

F L M E CB 4-DD WF LF + Stroke XD + Stroke ZD + Stroke Bore size (in) MM KK A AA B C CB CD D DD E EA EE F FA G J L LR M WF XD Y LF P ZD 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1/2 3/4 1/2 7/8 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 3/4 5/8 1/2 1 3/8 6 1/8 2.09 3 5/8 2.40 6 5/8 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1/2 3/4 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30 1.06 3/4 5/8 1/2 1 3/8 6 1/4 2.13 3 3/4

NCA1

KK CD B MM A C FA G WF J F L M 4-DD CW CB E CW LF + Stroke XD + Stroke ZD + Stroke Bore size (in) MM KK A AA B C CB CD CW D DD E EA EE F FA G J L LR M WF XD Y LF P ZD 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 3/4 5/8 1/2 1 3/8 6 1/8 2.09 3 5/8 2.40 6 5/8 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30

NCY2 series

I V 3 Reter to Data .1, with the calculated Fo and Lo, the appropriate type, magnetic holding power (L. H type) and bore size and can be selected. t> E E d: 0 t 2 3 4 5 6 7 8 9101112131415 . Distance lrom cylindj|3l!|!{9Ti 3 4 5 6 cylinder axis: Lo (cm) t 300 ; 200 i'i 100 = P e .F 20 '10 9' -4!

HRX-OM-R005

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

AMR3000 to 6000

AC 8 3 standard standard standard Pressure switch 1 2 None E2 E3 E4 E6 E10 S None With pressure switch AV Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR3000/4000 AMR3000/4000 AMR4000/5000 AMR5000/6000 AMR6000 1 standard Port size AU Thread Thread Symbol Port size Applicable model N F Rc (PT) NPT G (PF) Rc(PT) NPT G(PF) N F 02 03 04 06 10 1/4 3/8 1/2 3/4 1 AF The port size of adapter ass'y

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

I V 3 Reter to Data .1, with the calculated Fo and Lo, the appropriate type, magnetic holding power (L. H type) and bore size and can be selected. t> E E d: 0 t 2 3 4 5 6 7 8 9101112131415 . Distance lrom cylindj|3l!|!{9Ti 3 4 5 6 cylinder axis: Lo (cm) t 300 ; 200 i'i 100 = P e .F 20 '10 9' -4!