Modular F.R.L. Unit

150 00 1000 2000 3000 4000 5000 Flow rate L/min (ANR) Flow rate L/min (ANR) AC20 Rc 1/4 AC50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC25 Rc 3/8 AC55 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 500

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Large Bore Compact Cylinder Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

Regulator for 2 MPa ARX 20

600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics

Modular Type Regulator Series AR

Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 5000 10 0 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) 37 Regulator AR10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AR10 AR40 0.3 0.25 Set point 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2

Miniature Regulator Series ARJ310

600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01

Solid-state Auto Switches for Direct Mounting Series D-M9N(V)/D-M9P(V)/D-M9B(V)

(3000)(5000) 8 2 3.2 4.6 2.7 2.8 4 22 500(3000) 4 Most sensitive position 6 2.8 20 2.7 3.2 6 Most sensitive position 22 500(3000) 2.6 9.5 4 Specific Product Precautions Be sure to read before handling.

Refrigerated Air Dryer Series IDF/IDU

(Except for 1E to 3E) (Except for 1E to 3E) Refrigerant Coefficient of ozone depletion-Zero Model Air flow capacity Outlet air pressure dew point Rated inlet condition l/min(ANR) 50Hz 60Hz 100 200 310 500 740 1200 1650 310 500 740 110 220 350 570 810 1300 1820 350 570 810 IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDU3E IDU4E IDU6E Inlet air of normal temperature 35C Saturation 0.7MPa 10C

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

550 600 500 10 Built-in shock absorber CY1F 15 750 25 1200 Model Piping direction Centralized piping on the right side CY1F Centralized piping on the left side

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

Multistage Ejector (N)ZL Series

N220 "SYJ300/500/700" for details on valves. Option Specifications Vacuum pressure gauge specifications GZ30S Part number Fluid Pressure range Scale range (angular) Accuracy Class Operating temperature range Material Air 100 to 100kPa (-14 to 14 psi) 230 3% F.S.

5 Port Solenoid Valve Series SV

s Tubing Speed controller Solenoid valve Silencer 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 400 MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

Flow Sensor Series PFMV

suction 0.76 60 58 Before suction Before suction Flow rate difference Pressure difference Large Small Stable detection and less detection mistakes Unstable detection due to pressure fluctuation During suction 0 0 Vacuum release Vacuum release (Comparison under Nozzle diameter: 0.3, Vacuum pressure: 60 kPa) Repeatability: 2% F .S. or less PFM Response speed: 5 ms or less Proof pressure: 500

Precautions 1

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 25 32 40 143 156 168 181 206 231 256 147 160 172 185 210 235 260 149 162 174 187 212 237 262 181 194 206 219 244 269 294 For short strokes, a solenoid valve may protrude from the rod cover end.

Information

phase 170 to 253 VAC Main power supply 3.0 1.5 24 VDC 21.6 to 26.4 VDC 0.5 6 inputs 4 outputs 1 M (when differential receiver), 200 k (when open collector) 0 to 65535 (Command pulse unit) 3 rotations Parameter setting USB communication 32 to 131F (0 to 55C) (No freezing) 90 or less (No condensation) 4 to 149F (20 to 65C) (No freezing) 90 or less (No condensation) Between case and SG: 10 (500

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns