AMP

66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

AMPSeries

66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

PA3145/3165/3185

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

PSE100

ISA ZSE1 ISE1 Current draw on Output 1 and 2 too high (>120mA). Check load and/or wiring for Output 1 and 2. ZSE2 ISE2 Pressure is 2% above rated pressure during 0 clear. Panel mount Apply atmospheric pressure then do 0 clear. ZSP ISl ZSM 1 Turn screw 1/4 to 1/2 turn after panel makes contact with the sealing surface of the PSE.

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

3M/SMseries

5 1 28 PSI (1 9kgf/cm'?

A

Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260 14-21-20

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread Model 5 32 1 4 5 16 " " " " 3 8 Male connector KSH 10-32 UNF KQ2 1 8 NPT KQB2 NPT 1 4 KS KX KS KX NPT 3 8 KM Male elbow KSL 10-32 UNF KF NPT 1 8 M NPT 1 4 H/DL L/LL NPT 3 8 KC KK Precautions KK130 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Serial Network

Built with two self-diagnostic features: 1. Over-current protection of input blocks (mechanical fuse) 2.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Uniaxial Electric Actuator Series LJ1

2 1 2 Figure 2.

Booster Relay Series IL100

Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and fluid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 Flow rate L/min (ANR) 53

CDQ2BP series

JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ .9 o t2 ,r,rl fl^l rtu 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange

Compact Cylinder High Magnetic Field Design CDQ2BP Series

JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ t2 ,r,rl fl^l rtu .9 o 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange

Exhaust Cleaner for Clean Rooms AMP Series

66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5