Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

CP95

8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L,

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

Electric Actuator / Low profile slider type

For details of operation, and relationship between operation procedure and input/ output signals, refer to 3.3 Step Data setting method page 21 to 24. -6- 1.3 Teaching box 1. Name 2.

Speed Controller with Uni One-touch Fitting AS Series

11.0 15.2 18.5 20.9 18.5 21.7 20.8 21.1 22.5 25.3 33.1 23.3 23.9 27.2 35.3 26.4 29.5 31.8 32.8 26.4 29.5 31.8 32.8 33.6 35.2 27.9 28.2 29.6 32.4 40.2 32.5 33.1 36.4 44.5 37.9 41.0 43.3 44.3 37.9 41.0 43.3 44.3 47.9 49.5 17 17 17 19 21 32 32 34 36 53 55 57 59 53 55 57 59 94 95 14.5 AS-FE 14.3 1 8 14.2 36.1 31.1 30.5 25.5 15.5 18.5 21 14.5 15.5 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 12

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

MHF2

Description Contents MHF2-16D2 MHF2-16D1 MHF2-16D 20, 21, 22 MHF16-PS MHF16-PS MHF16-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit No.

VZ5000

Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Miniature Regulator Series ARJ210

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

VZ3000

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

Antistatic One-touch Fittings Series KA

Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 39.7 39.7 25.0 25.0 14.9 14.9 7 6 3 8 6 KAL08-00 6 6.8 7.5 23 26.5 28.5 11 17 12 10 KAL10-00 KAL12-00 21 Branch Tee: KAT Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) Q L M D Part No.

44

H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

NCA1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Air Cylinder Series MB

8 11 11 13 16 47 51 58 58 72 72 46 52 65 75 95 114 33.5 38.5 45 50 62 71.5 32.5 38 46.5 56.5 72 89 45 52.5 59 64 76.5 86 12 16 20 20 25 30 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 12 13 13 16 16 6 6 7 7 10 10 30 35 40 45 45 55 15 21 21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore size (mm) MO

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

side 55 75 35+30(n2) n=2, 3, 4, 80+30(n2) n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 10 80 75 90 1 Dif. sides Be sure to read before handling.