PF2A7H.eng

Upper digits Middle digits Lower digits 50% of max. rated flow Input of Set point 2 Input of hysteresis 2 [ 0] Monitor part L display [ U_1] 9 L Unit selection function 1 [oU1_n] Reverse output [F_4] Selection of switch operation LCD display 9 m3 (9 L) 9 m3103 (9 L) 9 L FLOW SWITCH [F_5] Key-lock function [ UnL] Unlocked Indicator LED (flow rate) Indicator LED (reference condition) 50% of

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

CYP

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

33

pc., Operation Manual (for installation/operation) 1 Weight Note 9) kg 32 For option -T: 39 Note 1) It should have no condensation.

MHS

19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150 230 440

Vacuum Equipment

Selection Step 1. Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Heavy Duty Stopper Cylinder

9 !5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

Table of Contents - Tubing

Roll Reel TRB0806 8 6 1 28 TRB1075 10 7.5 1 35 TRB1209 12 9 1 45 TRB0604 6 4 1 15 Model Inner O.D. mm Inner I.D. mm Outer layer tube thickness mm Min. bending radius mm Note 3) Length 20m 100m Specifications Operating fluid Max. operating pressure Burst pressure Operating temperature Material inner tube Material Hardness Air, Water Note 1) 145psi (1MPa) at 68F (20C) Note 2) Refer to burst

Model: SV4000, Valve Manifold Stations: 9

Model: SV2000, Valve Manifold Stations: 9

Model: SV3000, Valve Manifold Stations: 9

Model: 4000 (SV4000), Valve Manifold Stations: 9

Model: 3000 (SV3000), Valve Manifold Stations: 9

Model: 2000 (SV2000), Valve Manifold Stations: 9