CLS

For details, refer to page 9-9-21.

Mechanically Jointed Rodless Cylinders

12.2 47.5 Rc, NPT, G1/8 7 6 211 33 39 14 10 31 13.5 79 52 92 77 44 225 16 15 64 Rc, NPT, G1/8 8.5 7.5 259 40 46 15 14 37 14 94 66 112 92 60 276 19.5 16.5 80 Rc, NPT, G1/4 8.5 8.5 293 44 58 25 15 47.5 21 116 74 142 114 66 310 20.5 20 95 Rc, NPT, G3/8 10 10 336 64 70 29 16 58 20 139 99 162 136 84 356 23.5 27.5 110 Rc, NPT, G3/8 21 Series MY3A/3B Standard Type: 16, 20, 25, 32, 40, 50, 63 Stroke

Plate Cylinder

I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 9 11 13 16 18 22 26 32 3 4 5 6 13 14 17 23 21 24 27 39 CD-MU02 CD-MU03 CD-MU04 CD-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 16 8.5 10 11 16 19.5 24 26 36 9 11 13 16 8.5 10 11 16 11 14 15 20 8 10 10 14 Material: Rolled steel Surface treatment: Nickel plated Material: Rolled steel Surface treatment: Nickel plated Knuckle pin and

Electric Actuator

Note 7) Up to 16 axes can be set.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

16% 16% 4.48 lbs Cylinder tube 3.75 lbs 3.75 lbs 3.75 lbs Compared with the RS1H series.

Compact Cylinder

D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

MVGQ

For details, refer to page 10-20-41. 10-16-20

HRX-OM-X071

Required facility water system (for water cooled type) Table 3-2 Facility water source to be prepared Required facility water flow rate Heat Facility water temp. l/min range Model Radiated Facility water temprature oC kW 25 32 35 40 5 to 40 16 19 27 HRR050-W-20(Rating 25) Approx.10 HRR050-W-405 to 35 16 19 22 (Rating 25) HRR Series 3.2 Installation 3-5 HRX-OM-X071 Chapter 3 Transport and

Vacuum Manifold for fieldbus system

Parts on Page 21 9 Round head combination screw steel Refer to Replacement Parts on Page 21 10 Round head combination screw steel Refer to Replacement Parts on Page 21 11 Round head combination screw steel Refer to Replacement Parts on Page 21 -20No.

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

HRX-OM-W038

PV SV 16. Select communication speed (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1L15/20/25/32/40 (mm) d B A L JK J HI HG H G FB FA D C Model LD HT HS HP HO HB HA GP EB EA CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 12 9.5 7.5 75 9.5 M6 x 1.0 14 16 40 6.5 6 3 16.6 5 5.6 16 25 39 38 4 6.5 65 13 6 16 9.5 9.5 86 10 M6 x 1.0 16 18 46 8.5 21.6 5.2 5.6 20 31 45 44 10 9 80 16 11 9.5 86 10 M8 x 1.25 21 23 54 8.5 7 4 26.4 6.5 7 20 39 53 52 18 9 90 14 8 20 14 10.5 100 15 M10 x 1.5

EX120/121/122

Input: 16 points 4-branch settings Output:16 points 4-branch settings Input: Unused settings Output:16 points 4-branch settings Input: 8 points 2-branch settings Output:16 points 4-branch settings (at the time of shipping) Input Output Input Output Input Output 16 points 16 points 16 points 16 points 16 points 16 points 16 points 16 points 8 points 16 points 16 points 16 points 16 points

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.