Modular Type Regulators Series AR

Size 20 30, 40 Description Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 Description None Mounting Bracket Float Auto Drain (N.C.)

3 Port Air Operated Valve Series SYJA300 1

9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G NPT NPTF VP Air operated manifold F VA N T SA Body size A port size VV3PA7-41-051-04 3 5 standard 1 4 Symbol Port size Rc 02 03 04 Applicable manifold base model VA 3 8 standard standard 7 1 2 1 4 3 8 1 2 VV3PA3 VV3PA5 VV3PA7 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

VCC

00 02 04 No 2 port valves used 2 pcs.

PF2A/PF2W

Note 6) The flow switch is comformed to CE mark. 16-11-17 14 Series PF2W How to Order Remote type Sensor unit PF2W5 20 03 Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min Nil 1 2 04 20 40 11 Output specifications Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20 mA) Thread

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

3 Port Air Operated Valve

Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

Digital Flow Switches

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 -0.1 -0.3 12 18 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 -0.1 -0.3 16 25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 -0.1 -0.3 20 31.5 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 80 +0.084 0 -0.1 -0.3 25 35.5 100 Up to 750 20 to 750

Fluoropolymer Piping Equipment

LQ3T2A-R1 1/4" 1/8" 1/4" 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2 LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 LQ3T3A-R1 20 25 4 LQ3T3A-R2 1/8" 3/8" 10 9 11 33.5 32.5 14 2 LQ3T3A-R5 3/8" 1/4" 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20 4 LQ3T3A-R7 1/4" 1/4" 17 16 16 38 37 20 LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

AW

Size 20 30, 40 Description Metal Bowl Metal Bowl With Sight Glass NPT Threads Port Size Symbol 02 03 04 Accessories Symbol Nil B* C D Applicable Body Size 20 30 40 Port Size 1/4 3/8 1/2 Applicable Body Size All All 30, 40 30, 40 Description None Mounting Bracket Float Auto Drain (N.C.)

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

3

PF3W 5 04 03 1T Remote sensor unit Integrated PF3W 7 04 03 AT M display Type Made to Order 5 7 Remote sensor unit Thread type X109 X128 X143 Seal material EPDM Integrated display Nil Rc Analog 4 to 20 mA 2 output type Note) Rated flow range (Flow range) N F NPT Piping material brass G Symbol Rated flow range Note) Applicable only for remote type with 04 20 40 11 21 ISO228 equivalent 0.5 to

VQ5000

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel