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22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range For vacuum pressure For compound pressure None Bracket A (ZS-24-A) Nil 10.0 to 101.3kPa 100.0 to 100.0kPa Nil F A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Membrane Air Dryer

Port size 3 5 10 20 Port size Symbol Nil H Nil H H Nil H Nil 01 02 $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ 1/8 1/4 Thread type Symbol Type Nil Rc N F NPT G Component equipment 3 10 20 5 Component equipment Nil H Nil H Nil H Nil H Mist separator AFM20 AFD20 AFM30 AFD30 Micro mist separator Differential pressure gauge GD40-2-01 Regulator AR20 AR25 Replacement Parts (Element for mist separator, micro

High Precision Digital Pressure Switch, Series ZSE40/ISE40

22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range Nil F For vacuum pressure For compound pressure Nil None Bracket A (ZS-24-A) 10.0 to 101.3kPa 100.0 to 100.0kPa A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

36 132 50 41 200 74 60 230 74 60 271 86 70 22 36 110 180 544 612 873 JIS Symbol 1 4 1 2 2 Construction/Parts/Dimensions ANA1-01 to 06 Sound absorbing Case material (PFV ) End plate Hexagonal flats ANA1-06: PP How to Order Cover ANA1-10 to 20 Sound absorbing material Body Tension bolt End plate A1 03 AN Port size Symbol Connection Port size 1 8 01 1 4 3 8 1 2 3 4 02 03 04 06 10 12 14 20 (

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

With Factory Installed

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

Regulator for 2 MPa ARX 20

Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

Vacuum Pad with Ejector

A Mounting part (1) Fixed PD port 3 Guideline of PD port 1 PD port 2 tightening torque 3 to 5 [N-m] (5) Recommended One-touch fitting to be mounted at the PD port is the KQ2S06-01[]S or KQ2S07-34[]S. One-touch fitting may interfere with the top surface of the pad depending on the fitting dimensions.

SI Unit

Table C-1 Example of a checklist Checklist Device type/equipment identification EX260-FPS1 Version: HW/SW 01/1.1.1 Date 2017-July-1st Creator John Smith Test engineer Jane Brown System XXX has been checked for engine hood production Remark No. Requirement (mandatory) Yes Remark X No.

EXxx-OMY0006CN

Safety Mode (Channel Passivation) Safety Mode (Module Passivation/xxx)10.6 42 No.EX##-OMY0006CN Output feedback parameter SI Table 8-5 Output feedback parameter Enable Table 8-5 No. Bit (*) Bit (*) 1 0 I/O M 0 0 IN0 [0 and 4] 2 1 zone1 Z1 1 1 IN1 [1 and 5] 3 2 zone2 Z2 2 2 IN2 [2 and 6] 4 3 zone3 Z3 3 3 IN3 [3 and 7] (*) 10.9.2 LED 2 43 No.EX##-OMY0006CN 9. 9.1.

Sensor Monitor

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Front protective cover ZS-27-01 Lead wire with connector ZS-46-5L 5-wire, 2 m Connector for sensor lead wire ZS-28-C -8No.PS-OMW0014-B Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Soft Start-up Valve AV2000/3000/4000/5000 1

3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3

Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Cylinder

s st 10s' j 15 st" 20',' 1 3051 ~' 5~" 10.1[ 15 " 2ost L30s, R , 6 35.5 40.5 45.5 50.5 148.5 53.5 58.5 63.5 ' I52.5 57.5 162.5 67.5 7 10 40.5 45.5 50.5 55.5 65.5 1 54 59 '1 64 69 I 79 160.5 65.5.1 10.5 75.5 165.5 8 . 1 15 42 47 52 57 67 !

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.