CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

Modular F.R.L. Unit

04 01 02 VHS3002 03 VHS40-06 VHS3002 03 VHS20VHS403-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E500-06 Note 5) E200E400Piping adapter Note 5) 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Y3401 02 Pressure switch with piping adapter IS1000E-20 IS1000E-40 Y4402 03 Y5403 04 Note 5) Y24Cross interface Note 1) in part

Air Fittings & Tubing

18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 X 1.5 KQ2E16-04 18 44 132 Note1) ( ): Values for soft nylon.

VFR

NPTF T Exhaust cleaner (Option) Port size A, B P , EA, EB Connector mounting direction Symbol 03 04 3 8 1 2 1 2 Symbol Applicable base With connector M Mixed D Nil 01T, 10, 40 D side mounting None For bottom ported: Rc 3/8 only.

1

VM SUP blocking disk assembly SY30M-40-2A SY50M-40-1A SY70M-40-1A EXH blocking disk assembly Series SY3000 SY5000 SY7000 SY30M-40-1A SY50M-40-1A SY70M-40-1A XT34 Label for blocking disk If the blocking disk assembly is ordered using the manifold specification sheet and ordered at the same time as the manifold, the position where the blocking disk assembly is inserted will be labeled and

A

BMA2-050 50 BMA2-063 63 BM1-01 20 BM1-02 25 BM1-32 32 BM1-04 40 BM1-05 50 BM1-06 63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

A

62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106

Modular F.R.L. Units

-A, AFD30-A/40-A).

VFS

03 04 q Description No.

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

SY

Rc 1/8 (external pilot port) Rc 1/8 (Pilot EXH port) 164.3 <165.7> [167.5] (lead wire length) 75.4 [81.9] 34.5 17.5 15.5 29.5 29.5 44.5 5-Rc 3/8, 1/2 (piping port) 96.5 L type plug connector (L): DIN terminal (D): M type plug connector (M): 3 4 5 03 04 03 04 3 4 5 03 04 3 4 5 SY9 40(R)-LSY9 40(R)-DSY9 40(R)-MApplicable cable O.D. 3.5 to 7 75.4 [81.9] 107.5 63 100

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: With light/surge voltage suppressor ( ): VF5144-G-04 Conduit terminal: VF5144-T02 03 04 DIN terminal: VF5144-D02 03 04 02 03 04 VF5144-Y(Mounting hole) (Mounting hole) Manual override (Non-locking) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Applicable cable O.D.

Speed Controller with Indicator

32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS421FS-04-16 (S

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMF850-20 AMF900-30 AMF1000-40 AMF1000-40 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDU3DIDU4DIDU6DIDU8DIDU11CIDU15CIDU22C1-3 IDU37C1-3 IDU55C-3 IDU75C-3 AMD1010-40 Note 1) Air cooled

Secondary Batteries

90-PF2W740 PF2W5 20 03 90 Remote Type Sensor Unit Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 Series compatible with secondary batteries 90 Material restriction Thread type Nil N F Rc NPT G Port size 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W504, 90-PF2W520 90-PF2W520, 90-PF2W540 90-PF2W540 Lead wire Nil N M12 3 m lead