CA2

JIS B4636 + Two-angle socket 19 2.

HRX-OM-W002

HRR Series 3.4 Piping 3-19 HRX-OM-W002 Chapter 3 Transport and Setting Up [Tips] For HRR012/018/024/030-AN-20-HRR012/018/024/030-WN-10/20A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter.

Guide Cylinder Series MGG

(23) 175(189) 40 82 17 182 M12 x 1.75 depth 28 1/2 110 40 262 143 128 66 410 79 64.5 19(23) 180(194) 40 85 23 188 M14 x 2 depth 30 DNote) Rc, NPT and G ports can be selected.

HRX-OM-X037

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

HRX-OM-X084

HRR Series 3.4 Piping 3-19 HRX-OM-X084 Chapter 3 Transport and Setting Up [Tips] For HRR010-AN-10/20-,HRR010-WN-10/20A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter.

VM

VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion of R thread. 5-8-4 5 Finger Valve Series VHK Piping Precautions Caution Be sure to read before handling.

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

Thermo-chiller/Rack Mount Type

-inch rack (EIA standards1). 1 19-inch Rack Standards Standard EIA (Electronic Industries Alliance) 500 mm Standard no.

HRX-OM-X071

Required facility water system (for water cooled type) Table 3-2 Facility water source to be prepared Required facility water flow rate Heat Facility water temp. l/min range Model Radiated Facility water temprature oC kW 25 32 35 40 5 to 40 16 19 27 HRR050-W-20(Rating 25) Approx.10 HRR050-W-405 to 35 16 19 22 (Rating 25) HRR Series 3.2 Installation 3-5 HRX-OM-X071 Chapter 3 Transport and

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Refer to p.1.4-19 and 1.4-20. Rod Boot Materials Symbol Material Max. ambient temp.

Hygienic Design Cylinder Series HY

NTH-02SUS NT-02SUS NT-03SUS NTH-04SUS NTH-05SUS M8 x 1.25 HYC-H03SUS HYC-H05SUS HYB-H020SUS 3 3.5 3.5 4 5.5 7 7 8 M6 x 1.0 3.6 5 6 7 10 10 13 17 19 24 M6 x 1.0 7 8 8 10 13 17 17 19 M4 x 0.7 9 9.5 9.5 12 15.5 19 19 24 11.5 15 19.6 21.9 27.7 M8 x 1.25 M5 x 0.8 HYB-H025SUS M5 x 0.8 M10 x 1.25 Note) The above part number is attached with 4 bolts.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.1.4-19 and 1.4-20. Rod Boot Materials Symbol Material Max. ambient temp.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

HRX-OM-O021

Fig 3-19 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

HRX-OM-W038

Fig 3-19 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

HRX-OM-R005

Fig 3-19 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

HRX-OM-Y098

(Recommended tightening torque64 to 70Nm) CH2 particle filter Gasket(1/2) Fig. 3-19 CH2 side Installation of particle filter 6. Attach the CH2 filter bracket.

A_HEC-OM-K001

HED003-W2 A B 13 19 HED003-C2A B (Temperature Controller) HED003-HW13 19 (Heat Exchanger) HED005-W2 A B 13 19 HED005-C2A B (Temperature Controller) HED005-HW13 19 (Heat Exchanger) HED007-W2 A B 13 19 HED007-C2A B (Temperature Controller) HED007-HW13 19 (Heat Exchanger) Keep this manual available whenever necessary.