SMC Corporation of America
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(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB GC H HA J K L MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46

-See "How lo Order Manilold Assemblies," pg 46 Manifold. ifications Applicable solenoid valve Base mounted rype Plug-in lype NWsFRGOlT NVFR4OOO-OF NVFR4OlO-OD NVFR4Ol O-OE Non Plug-in type NWsFR4-10 Series NVFR4000: Base Mounted Tlpe Plus-in ryie: Wilh -@3T) l*-.,"o" a lvlaster conneclion of power and solenoid valves aQuick wiring permits ease of insiallalion.

83 101 152 3/h m (ANR)1 10 17 34 50 91 112 168 MPa 0.7 oC 35 oC 25 230V 50Hz oC 550 MPa 0.15 MPa 1.0 oC 24085% 1 AC230V10% 50Hz 4 2 A 1.2 1.2 1.2 1.4 2.7 2.9 2 W 180 180 180 208 385 420 3 A 5 10 50 dB R134aHFC g 1505 2005 2305 2705 2905 3505 Rc3/8 Rc1/2 Rc3/4 Rc1 R3/8 R1/2 R3/4 R1 mm 10 12 kg 18 22 23 27 28 46 1ANR 2065% 2 330mA 4 () 6-1 IDFA Series 6 1 IDX-OM-W017

No.PS-OMF0005CN-E / / ISA2 2 11 13 14 15 17 18 20 23 26 26 27 -1No.PS-OMF0005CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

PAX PB 17-5-59 18 Series LVD High Purity Chemical Valve, Compact Type Precautions 2 Be sure to read before handling. Installation and Removal of Tubing for Pilot Port Section Operating Environment Caution Warning 1. Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle.

-See "How lo Order Manilold Assemblies," pg 46 Manifold. ifications Applicable solenoid valve Base mounted rype Plug-in lype NWsFRGOlT NVFR4OOO-OF NVFR4OlO-OD NVFR4Ol O-OE Non Plug-in type NWsFR4-10 Series NVFR4000: Base Mounted Tlpe Plus-in ryie: Wilh -@3T) l*-.,"o" a lvlaster conneclion of power and solenoid valves aQuick wiring permits ease of insiallalion.

VXB Reduced apparent power Reduced coil temperature rise VXE 12 VA2 18 VA 15 VA3 20 VA VXP 24 VDC added 100C4 120C VXR 2 VXS23/24 Current model VXS22 3 VXS25/26 Current model VXS23 VXH 4 VXS23 to 26 Current model VXS22/23 VXF Electrical entry VX3 Grommet/DIN terminal Conduit terminal/Conduit VXA DIN terminal added Body material C37, Stainless steel Full-wave rectifier standardized High sealing

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (Positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment

W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Use caution so that the electrical entry for the lead wire and M12 connector does not rotate and is limited to only one direction. 18 LFE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor

12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18 16 14 XLD-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-15-1 2 Series ASS System Circuit Prevents accidents caused by sudden cylinder rod extensions If pressure is applied only to one side of the cylinder, the rod could get out of control, leading to

4 1.17-18 ALD600/900 Dimensions Related equipment/Strainer D.P. Lube ALD600-l06 to 10, ALD900-l12 to 20 At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5m) upstream with a metal seal solenoid valve, which is susceptible to dust.

76 94 88 14 4 10.4 10.4 8 17 18 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 53 54 55 24 20.9 22 26 8 12 46.1 46.1 105 Reference dimensions after R(PT) thread installation.