End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

60 80 42 39 10 22 62 93 10 70 15 85 146 147 1000 (1001 to 1200) 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 170 (179) 0.032 0.059 63 1200 600 600 600 18 11.5

CE

D-F9 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 Switch Hysteresis D-F9W 6 15 19 41 46 43.5 Proper auto switch mounting positions (Series CEP1 ) (mm) Bore size (mm) 12 Auto switch model Symbol 20 A B A B A B A B A B A B A B 75.2 82 Switch operating position (ON) D-A90, A93, A96 7.9 12 75.2 82 D-A90V, A93V, A96V 7.9 12 Hysteresis Reed switch: 2mm or less Solid state switch: 1mm or less 79.2 86

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

60 80 42 39 10 22 62 93 10 70 15 85 146 147 1000 (1001 to 1200) MGF 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5

Compact Rotary Actuator Series CRQ2

V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

reduces flow setting time

12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9 18.8 27.4 41.8 36.2 64.1 62.5 55.1 53.5 15.6 26 29 10 19 80 AS421FS-G04-12 12 18.5 30.8 45.2 35.1 17 82 AS421FS-G04-16 16 23.8 34.8 49.2 32.7 20.6 86 10.4 21.8 33 28.7 55.4

Digital Flow Switches

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 UP 2 + 12 to 24 VDC White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Direct Operated

4 0.19 4.6 2.2 3/8 (10A) 0.33 7.9 3 0.50 12 4 Note) Weight of grommet type.

Fieldbus system Analog unit

Parameter Setting 46 I/O Map 46 Diagnostic 46 Accessories 46 Precautions before mounting 47 -2No.EX-OMN0038-C Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

LEY-OM007

3 26 NBR 4 27 5 28 6 29 7 30 8 POM 31 9 32 10 33 11 34 12 35 13 36 14 37 15 38 16 39 17 40 18 101 41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

Clamp Cylinder Series CK1

40 50 63 45 43 46 36 48 51.5 33 55 58.5 1326 Clamp Cylinder Series CK1 End Bracket Single knuckle joint Double knuckle joint 12 +0.027 H8 0 Press-fit spring pin Shaft: 12 0.050 d90.093 Hole: 12 +0.027 H8 0 Press-fit spring pin 19 19 3 x 38 L 3 x 38 L 30 30 MK 17 17 20 CKQ CLKQ 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 15 15 CK1 2 x M6 thread depth 11 (for

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

HRX-OM-Q026

Threshold for alarm generation generation and other settings Code Alarm name A.RUN P.RUN A.STP Display Default Settable OFF Display range AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500 h 1 to 9 h 12 AL41 Power stoppage AL42 Compressor standby AL43 12 Fan breaker trip AL44 12 Fan inverter error AL45 Compressor breaker trip 13 AL46 Compressor inverter error

C92

10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190 215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

HRX-OM-R016

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R016 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

Pilot Operated

Coil with a full-wave rectifier (electrical option R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Applicable flange Model M A B C D E F H J K L N 22.5 25.5 25.5 M N 43 46 46 M 89 N 61.5 64 64 Q 49.5 52 52 M N 95 98 98 Q 64 66.5 66.5 Normally closed VXD2272 VXD2382 VXD2392 Normally open VXD2270 VXD2380 VXD2390 32A 40A 50A 12 14 14 35 40 40 22.5 25 25 67.5 70

15

V IC circuit 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V 5 V,12 V 12 V IC circuit Water resistant (2-color indicator) 3-wire (NPN equivalent) Grommet 24 V Reed auto switch A96V A96 IC circuit 5 V Yes A93V2 A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V No 100 V or less 1 Water resistant type auto switches can be mounted

Mechanically Jointed Rodless Cylinder Series MY2

150.1 PP 5.3 8 16 Q 140 185 290 QQ 16.4 20.4 25.5 QW 66 98 110 R 5 8 12 NX 7.3 10.5 14 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 Model MY2HT16G MY2HT25G MY2HT40G P indicates cylinder supply ports.