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-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) A, B port piping specifications Operating pressure range External pilot operating pressure range MPa SX3000 SX5000 SX3000 2 position single Pilot pressure range 2 position double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 C4 (4 One-touch fitting)/C6 (6 One-touch

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

MHZ

MHZ 26 MHF 2-M6 x 1 thread depth 10 MHL (Mounting thread) 5H9 depth 5 +0.030 0 MHR 12 0.02 4-M6 x 1 thread depth13 (Mounting thread) MHK 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Possible to transfer a workpiece at low-speed.

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to10 L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

CS1

39 M45 X 1.5 3/4 1 Lube Non-lube to 1800 1801 to 2000 18.5 132 245 226 182 115 M20 X 1.5 231 150 63 60 50 74 48 17 20 46 24 10 39 45 M56 X 2 to 2000 2001 to 2400 160 277 225 140 23 M24 X 1.5 301 180 298.5 20 29 71 67 60 86 60 25 56 12 49 55 M64 X 2 1 to 2000 2001 to 2400 200 365 330 270 140 M30 X 1.5 326 212 23 20 33 76 60 65 55 80 70 96 30 15 49 With auto switch/125 to 200 only (mm) (mm

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Basic Type/Direct Mount Type

38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 CY3B CY3R CY3B CY3R M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 CY1S M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 CY1L M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 CY1H M8 x 1.25 M10 x 1.5 P (Piping

7ND9071en

mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

SMC

5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018