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Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 12 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 13 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 14 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 15 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 16 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 17 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 18 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 19 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPT

(Refer to page 46 for details.) -45No.PS-OMW0012-C Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4) . 37 10 . 41 10.1 . 41 10.2 . 44 10.3 . 46

I/O . 36 6.1 . 36 6.2 (NPNPNP ) . 36 (1) I/O . 36 (2) I/O . 37 6.3 . 38 (1) I/O1 . 39 (2) I/O2 . 42 6.4 I/O . 44 (1) NPN . 44 (2) PNP . 46 7. . 48 7.1 . 48 7.2 . 49 7.3 . 51 7.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8. . 56 8.1 . 56 8.2 . 57 8.3 . 60 8.4 . 64 8.5 . 67 8.6 . 71 2 No.SFOD-OMT0009CN-B 8.7 . 73 8.8 . 73

Specifications 46 Dimensions 47 -1No.EX-OMK0006-C Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(mm) d L 6 5 18 10 5 20 16 13 33 d 20 14 40 L 25 14 46 32 16 56 9/10 3. Maintenance ! Caution As a jig is required for bore size 6, do not disassemble when replacing seals etc. If overhaul is required, contact SMC Sales Office.

drive power supply, Communication error, Battery error, Limit out, Abnormal driver parameter, RAM malfunction Protection functions Protection function indicator Alarm code 82 11 Dedicated Teaching Box Series LC1 Dimensions Communication cable connector STOP key LCD screen 170 11 STOP ENT DOWN ACTUATOR & CONSTRUCTION SYSTEM L R 76 26 UP 55 CONTROLLER POWER ALARM SMC HOLD /BS MODE /ESC c L 46

NT-02 NT-03 NT-04 Applicable bore size 20 25, 32 40 13 15.0 12.5 M8 x 1.25 5 LF LE LY LG 17 19.6 16.5 M10 x 1.25 6 LD 22 25.4 21.0 M14 x 1.5 8 Applicable bore size LH LR LC LD LE LF LG Part no. L Mounting Nut (mm) CM-E020B CM-E032B 20, 25 32, 40 30 10 8 6.8 22 15 30 24.5 Material: Iron 40 13 10 9 25 15 40 34 d Applicable bore size Part no. Included pin part no.

46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

For Dry Air, Pilot Operated 2 Port Solenoid Valve Series VQ20/30 Compact & lightweight with large flow capacity Weight (g) Effective area (mm2) 46 9 (Cv0.5) VQ20 VQ30 80 17.5 (Cv1) Series VQ30 VX VNl VQ Series VQ20 High frequency operation possible and long operating life High speed response 5ms or less (VQ20), 20ms or less (VQ30) (Without indicator light and surge voltage suppressor, at

power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02