REA/REB

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc. MQQ M n n pcs.

C95

K1 G2 ER G3 EN G1 K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12

Speed Controller with One-touch Fitting

14.2 43 (43) AS331F-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS331F-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 34 (35) AS331F-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS331F-03-12(S)A 12 18.5 42.5 28.3 57 17 40 (41) AS431F

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3

REA/REB

Contents REAS20-PS REAS25-PS REAS32-PS REAS40-PS 20 Above numbers 28, 29, 30, 31, 32, 33, 34 25 32 40 27 Series REAS Dimensions/10 0.5 1 4-M4 x 0.7 thread depth 6 6 3 12 8 47 + Stroke 20.5 12.5 2 25 12 5 2-M5 x 0.8 Hollow shaft for piping 10 12 40 60 Approx. 14 25 24 38 58 18 4.3 4-M5 x 0.8 Thread depth 9.5 M8 x 1.0 Auto switch 6.5 6.5 14 7.5 45 25 33 34 Auto switch mounting rail can also

51

12.5 11 10.5 15 15 17 20 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 6 7 7.5 7.5 12 12 16 16 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5

SFOD-OMT0005CN

(P.12) -80- 5(P.23) 9.1 (P.32) 3.4 (P.16) 10.(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

a2 = m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

CL

12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB With air cushion: CLG1BA CNA CNS CLS CLQ MLGP RLQ Component

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

\u/ (6oomm) Lead wire length :12 inch (300mm) L: L type plug connector with lead wire H"rt#'" mhrin*n" : 12 inch | ll-l.r :12 inch (3oomm) "!

CLK1

4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 102 + Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26

Clamp Cylinder with Lock Series CLK1

4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102 + Stroke 55 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-01-A18 52 171 222 80 82 16.5 28 43

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

CQS

6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 15.5 18.5 22.5 Rod end male thread Double clevis bracket material: Carbon steel Rod end nut For details about the rod end nut and accessory brackets, refer to page 7-6-20. 7-4-41 42 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Double acting: Single rod, Single

Series SV

02 12 stations 2 stations 12 One-touch fitting Note 2) Specified layout (Up to 24 solenoids possible.)

CJ2

CJ-CF006 CJ-CR006 M3 x 0.5 6 6 8 11 8 5 6 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 M4 x 0.7 10 8 10 13 10 6 8 29 2 9 4.5 3.1 18 40 22 32 12 8 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 M5 x 0.8 16 10 12 15 7 12 10 35 14 5.5 6.4 2.3 20 48 28 38 16 10 +0.048 0 6-3-11 12 12 Series CJ2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch Solid state switch

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Speed Controller with Indicator

(S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19