48

7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8

KS/KX

M D2 L A D1 M5 X 0.8 M6 X 1.0 36.5 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 12 8 6 17 14 12.8 1 8 1 4

MXF

8-6-12 13 Low Profile Slide Table Series MXF Dimensions: MXF20 Stroke adjuster at retraction end Stroke adjuster at extension end Width across hexagon socket hole 4 Width across flats 12 MX Blanking plug (M-5P 2 points) Possible to use as operating port 2-M5 x 0.8 N 2 ( 1) x 60 28 MTS N-M5 x 0.8 thread depth 9.5 60 (Helisert) 5H9 +0.030 0 depth 5 A 12 MY 8.5 6 78 9 64 15 CY 22 30 33.5

Precision Cylinder Series MTS

M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Slider Type/Ball Bushing Bearing

7 90 9 18 52 53 39 20 10.5 14 20 8 33.6 8 16 5 7 9.5 66 26.5 24.5 M10 x 1.5 15 100 9.2 110 12 26.5 64 64 47.5 25 11.5 14 25 8 41.6 10 20 5 10 10.5 78 30.5 28.5 M10 x 1.5 15 136 9.2 130 12 35 76 74 56 30 PA (N) (NA) (NB) ta P PB PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95 90 1.0 30 12.5 22.5 92 112 8

180

depth 3 0 5 4 7 4 x M4 x 0.7 thread depth 8 (Mounting thread) 2 x M4 x 0.7 thread depth 8 (Limted area for mounting attachment) 14 (Mounting thread) 2 x 4.5 through (Mounting hole) 30 38 28 28.5 30 20 17H9 + 0.043 depth 1.5 0 41 Positioning pin hole 2.5 12 55.5 20 69 Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) 18 8 3 4 25 7 M5 x 0.8 (Finger closing port) 2.5 MHY2

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

T

(mm) 6 8 10 12 2.5 I.D.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

PH 10.2 13 18.5 PI 41 57.6 72 PA 44 63 113 PB 80 110 132 PE 1 3.4 0.5 R 5 8 12 RR 5.3 8.5 11 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 NW 85.2 124.8 150.1 Q 140 185 290 QQ 16.4 20.4 25.5 QW 66 98 110 NV 4.5 6.6 9 NX 7.3 10.5 14 PP 5.3 8 16 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 Model MY2HT16G MY2HT25G MY2HT40G

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

240

side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.8 8 4 (Plug: M-5P) 4.2 25 24 8.5 3 0 +0.030 depth 3 A 3 0 +0.030depth 3 1.5 19 220.05 4-M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum suction port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 12 Stations, A B Port Size: M5 (Base Mounted M5X0.8)