Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Low torque Metal seal type Rotary joint

(6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

40 50 63 80 100 up to 500 97 89 74 49 50 12 17 up to 500 106 93 95 58 63 16 22 TDe8 TY up to 600 117 105 107 71 75 16 22 up to 600 117 105 130 87 90 20 28 up to 750 147 129 150 110 110 20 34 TT TX up to 750 147 129 182 136 132 25 40 TZ 1.7-35

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

EX260-SEN_eng

OFF M3 hexagon screw Tightening torque 0.6 Nm 1 2 0 0 0 IP address 192.168. Y . X : Thread size: M3 x 30 The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

EX260-SPN-A_eng

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC Model number GSD file M3 hexagon screw If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident. 1 EX260-SPN1/SPN2 GSDML-V.

EXxx-OMV0018_ENG

Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

EX260-SMJ_eng

M3 hexagon screw Tightening torque 0.6 Nm Terminating resistor Valve manifold : Thread size: M3 x 30 Troubleshooting The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

Air Cylinder CLA Series Fine Lock Model

with Rod Boot M14X1.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 t\,126X1.5 242 ' , u ' 2 O 27 /a 42 20 10 153 I 234 244 43 1.2 59 % 1 6 30 46 1 0 21 50 12 168 1 9 0 104 'r u:3j 38 261 273 52 1.2 66 269 1t4 31 ,s 48.5 23 60 '16 182 23 0 49 58 290 296 52 1.2 66 2Aa 37 ', 55 23 70 20 2Ca 2A 0 7 1 327 347 65 12.5 80 336 40 56.5 25 80 25 226 36 0 72 241 65 1 4 . 0 81 365 Trunnion Type/CLAT with Rod Boot

Title not found

with Rod Boot M14X1.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 t\,126X1.5 242 ' , u ' 2 O 27 /a 42 20 10 153 I 234 244 43 1.2 59 % 1 6 30 46 1 0 21 50 12 168 1 9 0 104 'r u:3j 38 261 273 52 1.2 66 269 1t4 31 ,s 48.5 23 60 '16 182 23 0 49 58 290 296 52 1.2 66 2Aa 37 ', 55 23 70 20 2Ca 2A 0 7 1 327 347 65 12.5 80 336 40 56.5 25 80 25 226 36 0 72 241 65 1 4 . 0 81 365 Trunnion Type/CLAT with Rod Boot M14X1.5

Stopper Cylinder Adjustable Mounting Height Type Series RSG

A 47 58 B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 Bore size (mm) 40 50 20 Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Basic type/Flange mounting These drawings (2 items) show the piston rod extended. Direction of work piece conveyance RSG-L Bore size: 40, 50 (98 + Stroke) Stroke 20 A 4-9 through 110 + Stroke 177 + 2 Strokes 67 + Stroke Approx.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.