RZQ

20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 32 18 36 10 A + Full stroke 40 18 36 10 50 22 44 14 63 44 22 14 10-10-11 12 Series RZQ Proper Auto Switch Mounting Position (For Detection of Piston A Stop Position) and Its Mounting Height D-A7 D-A80 U

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Precision Cylinder Series MTS

3.5 13 0.2 10 0.2 3.3H7 +0.012 0 6h7 0 0.012 20 0.2 28 20 0.2 27 39.5 18 17 77.5 + Stroke 15 M3 x 0.5 92.5 + Stroke 10 0.2 4-M4 x 0.7, effective length 6 19 14 0.2 Rod end male threads 6h7 0 0.012 Width across flats 5 Width across flats 5 Width across flats 5 M4 x 0.7 M4 x 0.7 5.8 8.1 8 8 8 2.4 7 9.5 9.5 9.5 4.5 4.5 4.5 29 29 29 Stud bolt part number: MT-S12 Stud bolt part number: MT-S12

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Cylinder with Lock Series CLS

PLC: Programmable Logic Controller Refer to pages 14 through 19 for sections related to auto switches.

VXP21/22/23

Dimensions (Orifice Size: 10 mm) Normally Closed: VXP2130 Grommet: G Conduit: C (67) (52) 20 23 (67) (52) 20 39 270 10 290 10 G 1/2 VC (5.5) (2.3) (2.3) (5.5) VDW 80 86 63 69 66.5 73.5 80 86 71 77 (33) 36 (33) 36 (27) 30 VQ (7.5) (27) 30 (7.5) Bracket 11 14 11 14 VX2 IN OUT IN OUT Bracket 24 26 50 2-Rc 1/4, 3/8, 1/2 (28) (28) 24 26 50 2-Rc 1/4, 3/8, 1/2 VX 22 28 40 22 28 Courtesy of Steven

MHZ2/MHZJ2

4 60 6.3 10 MHZJ2-10S Normally open 6 130 24 16 MHZJ2-16S 10 255 28 20 MHZJ2-20S 14 465 45 25 MHZJ2-25S 4 12 60 10 MHZJ2-10C Normally closed Single acting type, normally closed 6 31 130 16 MHZJ2-16C 10 56 255 20 MHZJ2-20C 14 83 460 25 MHZJ2-25C Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

) One-Touch fitting 4 tube 6 tube 8 tube 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 (g) Additional Weight by Stroke Pad diameter (mm) Stroke (mm) 20 30 40 50 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13 Series ZPR With Buffer ZPR 10/13/16 F J/K10-0-A10 (With Buffer) S M10 x 1 Width across flats 14 3 I 3 Width across flats 10 J Applicable tube O.D.

5 Port Air Operated Valve

center 3 4 5 VFA5 44(-P) 02 03 04 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 36 (39.5) 27 (31) 14 (15.5) 20.5 (24.5) 1/8 [Pilot port: Lateral (-P)] 2 x 5.3 (2 x 6.5) (For mounting) 82 (87) 5 (6.5) 51.5 (55.5) 2B 4A 42 (45) 52 (58) B A PE 6.5 5EA 3EB 1P 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 1/8 (Pilot port: Upward) 20 (16) 93 (97) 32.5 (28.5) 138 74 (78) 28.5 (32.5) 30 (31) 30 (31) 14 (15.5) 1

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

21.3 32.4 N 20 25 40 M 9 12 16 LW 120 176 229 G 8.5 10.7 15.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 B 9.5 14 17.5 (LL) 40 49.6 75 A 80 105 165 LE 5 6 8 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 Rc 1/8 Rc 1/4 PE 1 3.4 0.5 SS 9.7 14 21.5 TT 12.5 19.3 35.4 PF 10 12 20 RW 69 100 116 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 QW 66 98 110 R 5 8 12 RR 5.3 8.5 11 PD 23 29.2 36 QQ 16.4

3 Port Air Operated Valve Series SYJA300 1

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting