HRX-OM-W032

Checking: Circulating fluid flow rate 12. Press the [SEL] key once. Display of the circulating fluid flow rate appears on the digital display. PV SV Circulating fluid flow rate of this product is displayed as a guide. Unit: L/min.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 36 62 17 15 39 13.5 5 14 5 48 33 25 25 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 10 2.5 117 12 14 41 76 19.5 17 39 20.5 6 21 5 60 33 30 30 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 12 3 142 12 18 50 92 22.5 20 43 28.5 6 29 5 72 33 35 40 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 12.5 4 172 12 112 18 60 28 25 43 38.5 8 39 85 5 33 40 45 34 85 ( ) are the

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

VQ4000

5 3 1 A B 30 45 14 3 5 1 12 25.6 Mounting hole Manual override 25.6 Mounting hole 30 45 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc1/8 External pilot port Rc1/8 PE port 19.5 (21) 19.5 (21) 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port Rc1/8 PE port 31 31 31 31 : 3 position ( ): Rc3/

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

MHZ2/MHZJ2

12 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 +2.2 0 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

4-channel Flow Monitor ( compatible)

System error (Er0, 4, 6, 8, 40) is displayed. (2) Check if the power supply voltage 6 is in the range 12 to 24 VDC 10%. (2) Supply power in the range "HHH" is 12 to 24 VDC 10%. displayed. (1) Reset applied flow to a (1) Check if the flow exceeds the level within the set flow range.

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

MY1

(Refer to page 21 for details.)

Possible to transfer a workpiece at low-speed.

V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

HRX-OM-Y098

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

22.5 2-position single L plug connector (L) 52-SY7140 (R) -L13.5 02 03 79.2 41.7 61 10.4 21.5 2 x 4.3 (Mounting holes) 21 Manual override M5 x 0.8 (External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port) 71.2 (For E type) L (Lead wire length) 4.1 1.55 0.3 mm2 26.5 11.5 13.5

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

ITV

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1. Do not use a lubricator on the supply side of this product, as this can cause a malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this regulator. 2.

MU

4 M8 X 1.25 Depth 13 M10 X 1.5 Depth 15 M10 X 1.5 Depth 15 M12 X 1.75 2.4-12 Plate Cylinder/Single Acting Spring Return/Extend Series MU Dimensions Axial foot (mm) ZZ 114 127 143 169 179 Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 84 95 106 126 133 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUL25 MUL32 MUL40 MUL50 MUL63

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...