Speed Controller with Accessory: Cross Recessed Round Head Screw for Mounting (Zinc chromated) Model Size (Nominal x Length) Piece Metric size Inch size TMH-01J TMH-03J TMH-07J TMH-07 TMH-09 TMH-23J TMH-04J TMH-06J TMH-06 TMH-08 TMH-10 TMH-12 M3 x 15 M3 x 20 1 M4 x 25 M4 x 35 TMH-13 Series Holder mounting Select the applicable holder/TMH for each speed controller from the below table.
Prefix it to the part nos. of the solenoid valve, etc. 39 Series SYJ700 Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Blanking Plate Assembly Body ported (Type SYJ72) Base mounted (Type SYJ74) Model no.: SYJ700-10-2A (In common for body ported type and base mounted type) Round head combination screw M3 x 8, Matt nickel plated Round head combination screw M3 x 31, Matt
Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2
40 30 20 10 0 Initial value Measuring point 6 4.
A210 10 MHR2 Cylinder bore For MA2 With adapter Air connection size 10 mm 15 mm 10 15 Auto hand changer M3 M3 x 0.5 <10/16> MHZ Tool adapter A210 D 16 MHZ2 Y69A N Transportable mass MHF Transportable mass 3 kg 2 Cylinder bore MHL For MA2 With adapter 10 mm 16 mm 10 16 MHR Finger position MHK Standard Narrow type Nil N MHS Auto switch type Without auto switch Nil MHC D-Y69A (3-wire) Y69A
) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated
MHY2-10D MHY2-16D MHY2-20D MHY2-25D MHY2-10D MHY2-16D MHY2-20D MHY2-25D 6 8 10 12 4 5 8 10 0.88 2.1 4.3 7.4 0.59 1.3 3.3 5.9 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Body through-hole How to Mount the Attachment to the Finger Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (Lmm) Model MHY2-10D MHY2-16D MHY2-20D MHY2-25D 6 8 10 12 0.88 2.1 4.3 7.4
1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940 IDF-S1938 IDF-S0002 1 C42FP-260S 1 10 2 11 K 11 K 11-1 ( ) 11-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDFA6E-20-K N.O. () 0.151.6MPa 11 1 11 K IDF-S1926
If a socket without check valve is used, the check valve of the plug will not open. 343 KKA Series Flow Rate Characteristics Air Plug: With check valve Socket: With check valve Plug: With check valve Socket: With check valve 50 10 KKA9 Series (KKA9P-12F+KKA9S-12F) 45 9 KKA6 Series (KKA6P-04F+KKA6S-04F) 40 8 Flow rate m3/min (ANR) Flow rate m3/min (ANR) 35 7 30 6 KKA8 Series (KKA8P-10F+KKA8S
Contact P/A if an application under such conditions cannot be avoided. 10 One-touch fitting 10 One-touch fitting Parts list Material AFM20 Zinc die-cast AFM30, AFM40, AFM40-06 Aluminum die-cast Note Description No. Body 1 Platinum silver Replacement parts Part no. No.
1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4
1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4
bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167
Reference Heavy duty auto drain 6.3 Outer dimensions [IDF100F-30-W] Ball valve (O.D.10, Length approx. 2m) is also available.)
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3
Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1
Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Body Ported, Stations: 10 Stations, A Port Size: -, P R Port Thread: -