LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

: G DIN terminal: D 49.5 11.5 8.5 L1 L2 5 P = 19 14 49.5 11.5 8.5 2-4.5 (Mounting hole) 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 MAX.10 71.5 Pg.7 Manual override (Non-locking) 4-Rc 1/8 1(P), 3(R) port 18 25 31 53.5 300 (lead wire length) mPm Indicator light (Type DZ only) 4-Rc 1/8 1(P), 3(R) port 75.5 83 Manual override (Non-locking) n-Rc 1/8 2(A) port Applicable cable O.D. 4 to 6.5

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D 17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5

Nozzle Type Ionizer

61 61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5 49.5 A A P = 19 14.5 Common SUP, Common EXH/Side Ported: Same direction as solenoid Type S42 Manifold Grommet: G DIN terminal: D 49.5 11.5 8.5 L1 L2 5 P = 19 14 24.5 (mounting holes) 49.5 11.5 8.5 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override

VKF300

39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5 49.5 A A P = 19 14.5 Common SUP, Common EXH/Side Ported: Same direction as solenoid Type S42 Manifold Grommet: G DIN terminal: D 49.5 11.5 8.5 L1 L2 5 P = 19 14 24.5 (mounting holes) 49.5 11.5 8.5 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override

Ejector Valve Unit Series ZYY/ZYX 1

Hook Covering ZSE1-18, -19 Pressure setting trimmer 1 Pressure setting trimmer 2 3.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Calculate (1) (Wmax) from the graph of max. payload (W1, W2, W3) and calculate (2) and (3) (Mmax) from the maximum allowable moment graph (M1, M2, M3).

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Calculate (1) (Wmax) from the graph of max. payload (W1, W2, W3) and calculate (2) and (3) (Mmax) from the maximum allowable moment graph (M1, M2, M3).

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

x 0.5 28 32 8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3

CJ2X/CUX/CQSX/CQ2X/CM2X

Additional specifications No shock absorber is available for the Series MGGM. 10-3-18 18 Related Products: Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

CJ2X/CUX/CQSX/CQ2X/CM2X

Additional specifications No shock absorber is available for the Series MGGM. 10-3-18 18 Related Products: Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

PSE530/200

CH4 CH3 Pressure value for each channel are displayed at 2 second intervals. 16-3-18 18 Series PSE Specific Product Precautions 1 Be sure to read before handling. Controller Pressure Sensor Handling Handling Warning Warning 1. Do not drop, bump, or apply excessive impacts (1000 m/s2) while handling.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

RSH/RS1H

18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.