Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150

Step Motor Controller (Servo / 24 VDC)

CN4 20 - (2) Connection with a PC Controller setting kit Controller 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 Communication 50 200 50 200 3 3 CN4 cable PC (The PC should be obtained separately.) Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

Air Catch Sensor

200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

JXCx-OMT0062

Controller CN3 Actuator cable Electric Actuator Motor CN2 5.3 CN4: Serial I/O connector (1) Connection with the teaching box Controller CN4 Teaching box (The 3m cable is provided.) 26 - (2) Connection with a PC Controller setting kit Controller Conversion unit 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rubber seal Exhaust center 10-SQ1431 39 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less 100 Rubber seal Pressure center 10-SQ1531 39 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less 100 Rubber seal Note 1) Values for the cylinder port size of C6, CYL Values of EXH.

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Series IDK Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes. Made to Order If you require the moisture control tube with an effective length not listed in the above table, please contact SMC. 1

Compact Slide Series MXH

0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (6) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (12) Load Eccentricity 200 mm 1 10 10 0.1 Mass m (kg) 1 1 Mass m (kg) Mass m (kg) 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang

MXH

100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm D1 10 10 -X 0.1 1 Weight m (kg) Weight m (kg) Weight m (kg) 20 16 10 6 201 20 20 16 Data 0.01 0.1 16 10 10 6 6 0.001 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (12) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (6) Load

3 Port Solenoid Valve Series SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Series CE1

, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5

IZx-OMR0035

mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Error signal Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Output

Table of Contents

200 203 Series CDQ2 With Auto Switch.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303