25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 1200 80: 1400 100: 1500 80, 100 Note 1) Intermediate strokes other than the above are produced upon receipt of order.
P2: Nozzle internal pressure P1: Atmospheric pressure Nozzle Diameter Flow Characteristics (Vacuum) Nozzle Diameter Flow Characteristics (Positive pressure) 5.0 5.0 0.6 0.5 4.5 4.5 4.0 4.0 0.4 3.5 3.5 0.6 Flow rate [l/min] Flow rate [l/min] 3.0 3.0 0.3 2.5 2.5 0.5 2.0 2.0 1.5 1.5 0.4 0.2 1.0 1.0 0.3 0.5 0.5 0.1 0.2 0.1 0.0 0.0 80 60 40 20 0 0 50 100 150 200 250 300 P2 [kPa] P2 [kPa] Example
Stations L1 L2 L3 L4 2 123 112.5 91.5 15.5 3 4 5 6 7 8 9 10 148 137.5 123 12.5 173 162.5 144 14.5 198 187.5 165 16.5 135.5 125 102 16.5 160.5 150 133.5 13.5 185.5 175 154.5 15.5 210.5 200 175.5 17.5 148 137.5 112.5 17.5 Stations SS5X3-45GDBC4 C6 Stations L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 160.5 150 129 15.5 185.5 175 150 17.5 185.5 175 160.5 12.5 210.5 200 181.5 14.5 148 137.5
Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for
Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding
Viscosity of the operating fluids must be less than 50 cst in general.
1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation
-XA< Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150
Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)
) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine
Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon
(2) AC 50/60 Hz VCW2: 8.5VA, VCW3: 10VA, VCW4: 13VA VXA Note 1) When using pure water, select L for the type of material (Stainless steel, FKM).
Refer to catalog N366 Series Variations @ Boq1" l N m ) L lg) 10 16 20 25 32 40 50 MHY2NOD 10 0 . 1 6 71 70 MHY2N60 1 6 0.54 84 150 MHY2-MD 20 1 . 1 0 106 3m MHY2.25D 2.24 560 MHw2 Rack Style Unique seal design Grippng force when allows shorter total length construction and constant opening and closing fingers.
No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter
Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon
(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides
Adsorption Plate SP Series RoHS SP SP How to Order ZCUK AMJ SP 30 1 1 AFJ Sintered metallic element particle diameter Adsorption Plate AMV 30 0.3 standard ZH -X185 Adsorption surface size 1 2 3 4 5 6 Shape 1 2 Rectangular Square 50 x 50 mm 100 x 100 mm 150 x 150 mm 200 x 200 mm 250 x 250 mm 300 x 300 mm Related Products Standard Specifications SP1130 SP2130 SP1230 SP2230 SP1330 SP2330 SP1430
50 200 3 3 Communication CN4 cable PC (The PC should be obtained separately.)
Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.
actuation 350 300 250 200 150 100 50 0 VQD1151U It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.