240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Membrane Air Dryer

500 300 500 75 110 Standard Performance conditions Purge air flow rate L/min(ANR) Inlet air pressure MPa 60 86 29 50 18 25 *Note3 0.7 25 Inlet air temperature oC Inlet air saturation temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} 25 Ambient temperature oC Relief type 1/4 3/8 Regulator construction (about Type V) Port size

-fl Seies

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

3 Port Solenoid Valve

Lead wire length 46 -SCSJ3000For single solenoid: Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 46 -DCSJ3000For double solenoid : Common specifications 46 47 For positive common For negative common For junction common How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment MG Va Calculation Example CX m Operating Conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2.

PSxx-OMM0006CN

X B(ZS-24-B) M45L B -16No.PS-OMM0006CN-E M8(3) (ZS-35-C/ZS-35-D) +(ZS-35-F/ZS-35-G) () ZS-35-C/D -17No.PS-OMM0006CN-E 79 Nm M5 (12mm) 1 2 1) 0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -18No.PS-OMM0006CN-E () TU0425 ( 4 2.5) -19No.PS-OMM0006CN-E (M8(3)22) Z/ISE40A--DC(+) -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -S/-R () NPN 2

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

Digital Flow Switch (Integrated display type) ( compatible)

(Page 83) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis (Hysteresis) 1013 0x03F5 0 R/W U16 50 Y P1L(n1L) (Lower limit of window comparator) Setting range Refer to "Settable range list". (Page 83) Setting of OUT1 output set value (Lower limit of window comparator) 1014 0x03F6 0 R/W S16 300 Y Setting range Refer to "Settable range list".

HRX-OM-W058

Applicable model HRS0 -A -20-T-R Rated flow (50/60 Hz) Note 1),2) L/min 10 (0.35 MPa) /14 (0.35 MPa) Maximum flow rate (50/60 Hz) L/min 17 / 20 Pump Maximum pump head (50/60 Hz) m 70 Output W 610 Recommended earth leakage breaker capacity A 15 Cooling capacity Note 3) W The cooling capacity reduces approximately 300 W from the value in the catalog Note 1) The capacity at Thermo-chiller outlet

OMR0031

LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds 0.5 to 5.0 the set value.

Digital Flow Switch (Integrated display type)

Indicator light Output 1 and 2: Orange Power supply voltage 12 to 24 VDC 10% Current consumption 50 mA max. Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Compact Slide Series MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Up to 100 Up to 300 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) 50 (4) 200 (6) 50 (7) 200 (9) 50 (10) 200 (12) (2) 100 (5) 100 (8) 100 (11) Load eccentricity (l mm) (1) (3) Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also

PA3000/5000/PAX1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

HRX-OM-R026

Table 8-1 Quality standard for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1)

HRX-OM-I051

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L