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No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO

Refer to back page 50 for Safety Instructions, pages 17 to 19 for Fluids Control 2 Port Valves Precautions, and pages 467 to 470 for VDW Series/Specific Product Precautions. Selection Mounting Warning Warning 1.

99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5

Valve diagnostics 2 Table 9-5 Valve diagnostics 2 Bit 0 Zone21 0:, 1: 1 Zone22 0:, 1: 2 Zone23 0:, 1: 3 Zone24 0:, 1: 4 Zone25 0:, 1: 5 Zone26 0:, 1: 6 Zone27 0:, 1: 7 Zone28 0:, 1: 45 No.EX##-OMY0006CN 9.1.1.5.

, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

IDF60/70/80/90 Series 7-1 IDX-OM-W093 oC 530 35 40 45 50 55 60 65 IDF60/IDF70 1.26 1.00 0.78 0.64 0.54 0.42 0.35 0.27 IDF80/IDF90 1.30 1.29 1.00 0.81 0.63 0.55 0.47 0.39 MPa 0.2 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.3 1.6 IDF60/IDF70 0.70 0.74 0.87 0.92 1.00 1.02 1.05 1.05 IDF80/IDF90 0.64 0.75 0.86 0.93 1.00 1.04 1.07 1.09 20 25 30 32 35 40 45 IDF60/IDF70 1.12 1.07 1.05 1.00 0.94 0.83 0.71

No.PS-OMR0001CN-J // ISA3 1 2 7 8 14 15 2 (ISA3) 15 () 16 (2 ) 16 17 20 26 26 29 34 38 3 41 42 44 44 44 45 45 4 46 46 46 () 58 59 60 5 61 62 62 -1No.PS-OMR0001CN-J 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 5/16" 10 3/8" 12 1/2" Note) For applicable tubing O.D. selection, refer to the Model.

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

Specications [mm] Table 1 Cylinder Strokes Bore size Stroke 16 15, 20, 25, 30 20, 25 15, 20, 25, 30, 35, 40, 45, 50 32 to 63 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Ambient and uid temperature range 32 to 302F [0 to 150C] Seal material Fluororubber Grease Heat resistant grease Standard stroke See Table 1. Dimensions See below.

45 50 H1 5 6 6 8 20 0 0.033 0 0.033 0 0.033 0 0.039 20 26 26 32 M10 X 1.25 25 M10 X 1.25 M14 X 1.5 32 40 Boss-cut Dimensions for Other Mounting Brackets Bore ZZ 106 110 112 141 Add 3mm to each ZZ dimension of the standard style (double acting/single rod) on p.1.4-10 to 1.4-18. 20 Auto Switch Position Basic Low friction 25 CM2QB20SCM220A, #1 CM2QB25SCM225A, #1 CM2QB32SCM232A, #1 CM2QB40SCM240A

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

55 Reverse rotation suppression input Alarm reset input PG output C phase 0V Servo alarm output 0V Frame ground 65 75 For LX Positioning complete signal output 0V External power supply input A 50 50 Driver model SGDE-A3BP SGDE-A3AP B 55 55 Example for driver connection between equipment +10% 15% +10% 15% Single phase 200 to 230VAC (50/60Hz) For 100V Single phase 100 to 115VAC (50/60Hz) R

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. Design/Selection Caution AS-F 1. Single acting cylinder When controlling a single acting cylinder, the cylinders return speed will differ depending on the operating conditions. Operate after confirming the maximum return speeds shown in the table below.