Manifold Specifications

VAC, 100 VDC or less.

HRX-OM-Z002

Table 8-1 Water quality criteria for clear water (tap water) Item Unit Standard value For circulating fluid For facility water pH (25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Low Maintenance Filter Series FN1

100 .001 10 30 50 70 100 Q (l/min) Q (l/min) Filtration Efficiency (Initial Value) Fluid: Potable water Flow rate: 20l/min Liquid temperature: Room temperature Test dust: AC course Amount of dust: 0.2mg/min Test method: Per P/A test method (sanitary test stand, HIAC particle counter) 100 100 ) m ) ) m m 0 ) 0 m (2 (2 (5 (5 20 20 05 05 -0 S0 S0 S0 0S 00080 N-1 N-1 80 N-1 -1 1N 101 101 101

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

17

50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29

CM2

75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 109.5 201 to 300 126 130 130 134.5 301 to 400 151 155 155 159.5 401 to 500 176 180 180 184.5 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256

JXCx-OMU0026

LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max. speed [mm/s] 70 80

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

CG5-S

130 7 M22 x 1.5 80 3/8 28 17 212 100 to 1500 125 110 131 30 40 37 41 60 30 29 20 71 16 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 15 216 Foot brackets and plug bolts are installed before shipment from factory.

CM2

, 125, 150 CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

CG5-S

130 7 M22 x 1.5 80 3/8 130 28 17 212 100 to 1500 40 37 41 125 60 30 29 20 71 16 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 131 30 15 216 110 Foot brackets and plug bolts are installed before shipment from factory.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage 12, 24 VDC, 100, 110 VAC Note) The withstand voltage specification for the wiring unit section conforms to JIS C0704, Grade 1 or its equivalent.

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

Ionizer

V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

CJ5-S

130 7 M22 x 1.5 80 3/8 28 17 212 130 100 Up to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 30 15 216 131 Foot brackets and plug bolts are installed when shipped from factory.

CJ5-S

130 7 M22 x 1.5 80 3/8 130 28 17 212 100 Up to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 131 30 15 216 Foot brackets and plug bolts are installed when shipped from factory.

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

LG1H

70 170 270 370 470 570 670 770 870 1070 Dimenstions inside ( ) are for a 100 mm stroke.