q"s

Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4

-- NCM seies

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

IIIIIII

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

Compact

116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

LEC-OM071xx

Analog monitor output voltage 1 [V] Gain adjustment 1000 [min-1] Motor speed Item Specifications Gain-adjustment Range 10050% Adjustment Unit 0.4%/LSB The gain adjustment range is made with a 100% output set as a center value (adjustment range: 50% to 150%). The following is a setting example.

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IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Overall length (Z) Height(H) Up to 36% reduction MY3A With rubber bumper Height (H) MY1B MY3A/3B MY3B With air cushion Height(H) (mm) Series 16 25 40 63 MY3A MY3B MY1B 27 37 54 84 MY1B With air cushion 37 54 84 116 Up to 53% reduction Max. 53% Weight Overall length(Z+Stroke) Z dimension Weight (kg) (mm) Series 16 25 40 63 Series 16 25 40 63 MY3A MY3B MY1B 0.34 0.87 2.95 8.26 MY3A MY3B MY1B 110

Multistage Ejector (N)ZL Series

Suction flow rate Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate 250 125 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure

High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Compact Cylinder

Compact Overall length shortened Width shortened 6.5 mm JCQ 20 JCQ 20 6 mm 10 mm stroke Height shortened 4 mm 10 mm stroke JCQ 20 Current product 20 (CDQS series) Current product 20 (CDQS series) Max. 45% lighter Weight 150 ga82 g (Compared with the current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm]

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 70mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 70mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 150mm, First Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -