4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

VEX1

2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710 VEX5711 1 4 1 4 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 13 105.5 103.5 18 4-M6 X 1 X depth 6 136.5 60 17 82 c Bracket mounting dimensions h Grommet terminal i Conduit terminal g Grommet j DIN connector a Model b d e f VEX5510 VEX5511 19 130 110

Prevents Micro-Bubbles

(mm) Dimensions A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 17-5-29 27 Series LVH Dimensions/Threaded Type N Body material: Stainless steel Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

ZK2-C

-OM00801-B <> A [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) -26NO.ZK2-OM00801-B [F 3] <> [F 3] [F 3] -27NO.ZK2-OM00801-B [F 4] <> [F 4] [F 4] (29) ON/OFF -28NO.ZK2-OM00801-B OUT1 AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1 P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 -29NO.ZK2-OM00801-B [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11

CYV

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

A M2 = F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Series CV Valve Mounted Cylinder Precautions Be sure to read before handling.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

A M2 = F x L M3 = F x L M1 = F x L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection

Booster Regulator/Air Tank

100 200 1 0.5 30 0.5 0.8 Provide requisite conditions for selection.

PC Wiring System Series PCW

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

ZQ

above dimensions are for ZQ11U-J2 L-F.