Rotary Table

M5. 2 180 Standard tyoe Number of auto switches 3 90 4 180 2pcs.

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

reduces flow setting time

In addition, the universal type is only available with 180 setting. 588 A Speed Controller with Indicator AS-FS Series Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (

AR Series Modular Type Regulator

G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L AR -A -B Note 1) Assembly of a bracket and set nuts Note 2) l in round pressure gauge part numbers indicates a pipe thread type.

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

VM

MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM122-M5-00 VM132-M5-00 37.5 VA 1.5 mm O.T. 3.5 VM123-M5-00 VM133-M5-00 2-4.6 mounting hole 33.5 3.0 mm T.T.

PFxx-OMK0003CN

M3 (2 ) (M315 L) 0.320.02 Nm L M315L () M315L L () L () M4 (2 4 ) 1mm (22 ) -14No. PF-OMK0003CN-E 0.320.02 Nm L () L () M4 (2 4 ) 1mm (22 ) -15No. PF-OMK0003CN-E 11.5mm , , , , IN 500kPa /KQ2 mm KQ2H04-M5 KQ2S04-M5 4 M50.8 KQ2L04-M5 /KJ mm KJH04-M5 KJS04-M5 4 M50.8 KJL04-M5 /M mm 4 M-5AN-4 M50.8 6 M-5AN-6 -16No.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

AS-FPQ/AS-FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

AS-FPQ/AS-FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

3-Position Rotary Table

Follow the appropriate procedure (R or L) shown in Table 2.

modular-press-e

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

Modular F.R.L. Pressure Control Equipment

Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates

E-MY2_E_D

Motor Controller Direct mounting Use M4 mounting screw shown in fig. 1 or M5 tap hole to mount the controller. Mounting screw (M4) fig. 1 Mounting by L type bracket Mount the optional L type bracket on the main unit using the two mounting screws M5X8L and install on the facility using hexagon socket head cap screws as shown in fig. 2.

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

(B) 2 (A) 4 Symbol 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Port size Valve model Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.