Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)

rep-modular-e

9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Modular F.R.L. Unit

5.5 7 9 9 11 Model Y100T Y200T Y300T Y400T Y500T Y600T AC10 AC20 AC25, AC30 AC40 AC40-06 AC50, AC55, AC60, AC50B, AC55B, AC60B Part no.

Compact Type Dual-Rod Cylinder Series CXSJ

9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

TABLE OF CONTENTS

COIL NO. 8.4 4.8 9.7 12.0 19.5 24.0 38.0 7.7 4.4 8.9 11.0 18.0 22.0 35.0 5.0 3.0 6.0 8.0 12.0 16.5 24.0 15-17040-3 15-17040-4 15-17040-5 15-17040-6 15-17040-9 15-17040-10 15-17040-13 15-17039-3 15-17039-4 15-17039-5 15-17039-6 15-17039-9 15-17039-10 15-17039-13 *15-17034-3 *15-17034-4 *15-17034-5 *15-17034-6 *15-17034-9 *15-17034-10 *15-17034-13 43.0 76.0 120 61.0 40.0 70.0 110 56.0 28.0

ZP

P ZPR02U 2 4 6 8 1.2 1.6 2.5 2.5 2.6 4.8 7 9 ZPR04U ZPR06U ZPR08U 20 65.5 25 70.5 0.8 1 Applicable Tubing Applicable tubing O. D.

MXS

9 & #2 to #5 1 set including !7 to !9 & $1 to $3 1 set including !7 to !

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

EXxx-OMN0037CN

8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

DOC1020530

is displayed. -9 to 9 mm 10STM 4 Cumulative feedback pulses Feedback pulses from the motor encoder are counted and displayed.

CXT

D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21

Environment

9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Do not connect with other pins. 1 6 9 5 D-sub 9-pin female (socket) type 9 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Optional Accessories Consumables List Part no. Description Qty.

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge