Miniature Regulator Series ARJ210

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate

CXWM/CXWL

9 Nickel plated Nickel plated Nickel plated Round type R snap ring Lock nut Plug Plug Magnet Set screw for seal Spring Type CR snap ring Replacement Parts: Seal Kit Round type R snap ring Shock absorber Nickel plated Model Kit no.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

Electric Actuator Miniature Rod Type Miniature Slide table Type

) Actuator specification Horizontal Compact 10 to 200 20 to 350 Note4) Speed [mm/s] Note3) Note6) Vertical Basic 10 to 150 20 to 300 Note4) 10 to 150 20 to 300 Note4) Compact 10 to 150 20 to 300 Note4) Pushing speed [mm/s] Note5) 10 20 10 20 Acceleration / Deceleration [mm/ s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] +/0.05 Lost motion [mm] Note7) 0.2 or less Impact

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

Platform Cylinder Series CXT

YES Model selected Without shock absorber Model selected With shock absorber 522 Series CXT Non-rotating Accuracy of Slide Block p y r CXTM CXTL (Slide bearing) (Ball bushing bearing) p (= y) r p (= y) r Bore size (mm) 12 0.09 0.12 0.05 0.05 16 0.08 0.10 0.05 0.04 Pitching direction Rolling direction Yawing direction 20 0.07 0.08 0.04 0.03 25 0.07 0.07 0.04 0.03 32 0.08

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Low Friction Cylinders Series MQ

6 r t !3 w q e !5 !0 !1 !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Maximum flow rate under positive pressure [L/min (ANR)] Inch size Metric size 100 200 300 Series ZFC5 4 5/32" 45 6 1/4" 100 ZFC7 6 1/4" 120 8 5/16" 250 10 3/8" 300 12 350 Flow rate (positive pressure) conditions: Supply pressure 0.1 MPa, Differential pressure 30 kPa Metric size: 5 sizes Inch size: 4 sizes Light gray Orange CAT.ES100-103A Series ZFC Series ZFC 2 types of transparent case

NVKF

3 0 s.sll as6 I +s (84) (103) (122) 7.05 I 7.8 8.54 (17e) (198) (217)s.zg lro-oa 1o:g (236) (255) 1274) 1 1 . 5 4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted

3 Way Direct Acting NVKF 300 Series

1 3 0 s.sll as6 I +s (84) (103) (122) 7.05 I 7.8 8.54 (17e) (198) (217)s.zg lro-oa 1o:g (236) (255) 1274) 1 1 . 5 4 r 1 2 . 2 8 (141) (160) Body Ported (Top Ported) /Type 21 Manifold NVV3KF3-21 -Stations-007 inch (mm) Lr Dimensions n: Stations 20 1 r v L-'-Ll I 1 0 1 1 10.79 11.54 12.28 (274) (2s3) (312) 4.8 5.55 (122J \141) (179) (198) 15.28 {388) t2 0ilnffision$ $mim llUlff 300 Base Mounted

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

HRX-OM-W060

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

HRX-OM-Y098

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

MU

3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27

4/5 Port Air Operated Valve SYJA3000 Series

SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

Compact Cylinder

0 i r t !2 !4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

Filter Regulator IW Series

400 200 500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow