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Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F

500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

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Thermo-chiller with exhaust from the side: Body space: W15.7in (400 mm) x D 33.3 in (845 mm) Ventilation space: 3.9 in (100 mm) 15.0 (380) HRW008-H : Body space: W15.0 in (380 mm) x D 26.2 in (665 mm) Ventilation space: 0 15.7 (400) 3.9 (100) 33.3 (845) 26.2 (665) 10.0 ft2 (0.93 m2) 5.5 ft2 (0.51m2) 98 High Performance Easy Maintenance Temperature stability: 0.54F (when a load is stable)

600 800 1000 0 0 200 400 600 800 1000 Kv value Volume ratio (Kv) (2) If your operating conditions are different from these basic conditions, apply a correction factor.

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Therefore, check the initial position by means of power supply or manual override prior to use. 3(R) 4(A) Vacuum pad 1(P) 2(B) Vacuum releasing air Atmospheric pressure or micro pressure 2 3 5 Use a VQD1 1 valve for vacuum applications. Connect the vacuum source to the 3(R) port. Air pressure cannot be applied to the 3(R) port.

Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

Mounting ends tal ioh hole Both J r,rr.rt o, n ,r o*nnt tnoit -.r, ,.rt*lt r Type ol auto switch (Rail mounled) @ Bore size . Reed switch isee P.11 lor detaits.) Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.)

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

(mm) W White R Red H Black (B) White (W) BU Blue Tubing model Y Yellow Blue (BU) Red (R) D G Green C Clear Yellow (Y) Green (G) Clear (C) Orange (YR) MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YR Orange T Length per roll VMG 20 20 m roll Fluid Air/Water Max

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

F UJ ' r-, ~\\ _ \. / r\ o .-: . <-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port. The pressure difference generated at this time lets the check valve open y and the residual pressure on the A port side is quickly exhausted from R port.

VCHC ASR ASQ 669 AS-FG Series Construction Elbow type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread e e !0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.