IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

LEY-OM007

40 (2000[mm/s 2]) 6 17 30 18 50 50 30 60 60 [kg] 2) (3000[mm/s 2]) 2 4 8 8 16 30 11 22 43 [N] 3) 4) 5) 1438 2774 51141 63122 126238 232452 80189 156370 296707 [mm/s] 5) 15500 8250 4125 18500 9250 5125 24500 12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800

LEH_C

LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800

VZA200/400

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Lubrication Dustproof [Degrees of protection 0] (4) VZ Enclosure Shock/Vibration resistance (m/s2) Electrical entry Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC

AMR3000 to 6000

Do not apply strong shocks (over 300 m/s2) to the pressure switch to prevent the switch from damage. AV AU AF Caution Flow rate (/min (ANR)) Inlet pressure (MPa) 1. Release the lock to adjust the pressure. After the adjustment, engage the lock.

10

4/RJ08 4 4 12 10 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] RJ1007L 3 3 8 RJ0806L RJ0604 2 6 2 4 RJ0806H RJ1007H 1 1 RJ0805 RJ1006 2 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 200 400 600 800 1000 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] Graph !6/RJ14 Graph !8/RJ27 Graph !

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Information

/www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2012 SMC Corporation All Rights Reserved 11-E597 QT -RRD-5M Information AC Servo Motor Driver Series LECSm Power Supply Voltage 100 to 120 VAC 200 to 230 VAC Motor Capacity 100/200/400W Series LECSA (Pulse Input Type/Positioning Type) Incremental Type Absolute Type Up to 7

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

CY1F

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. All models of PNP output type switches do not have built-in short circuit protection circuits.

ITV

P4 is selected by the ON/OFF combination of S1 and S2.

10

(PPS) NBR, FKM Resin (PPS) NBR, FKM Aluminum 1 2 3 4 5 6 7 8 9 10 11 27 Series VX21/22/23 For Air Dimensions/Body Material: Aluminum Grommet (with surge voltage suppressor) Grommet D 300 Q F 300 Q F D C R C R E (1.5) (1.5) E Y Y A 2 x P Port size A B1 B B1 B 2 x P Port size U W M U W M 2 x 5.3 Mounting hole X X 2 x 5.3 Mounting hole DIN terminal Conduit terminal S Q F Cable 6 to 12 Q2 S2

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: S4 (400W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length: 2

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: T6 (100W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: T8 (400W Output, Absolute Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length: 2 (2m

Size: 40, AC Servo Motor: 400W Output, Absolute Encoder, Lead Screw: Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 800mm, Motor Option: w/o Lock, Actuator Cable: Standard Cable, Actuator Cable Length: 2m, Controller: -, I/O Connector: -