Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 64 40 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 74 50 75,100 66.5 40.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 68 42 10 to 50 63 78 52 9 9 80 92 108 18 8 60 78 52 75,100 For details about the rod end nut and accessory brackets

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 40 64 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 50 74 75,100 40.5 66.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 42 68 10 to 50 63 78 52 9 9 80 92 108 18 8 60 52 78 75,100 For details about the rod end nut and accessory brackets

MLGP

25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

Air Slide Table Series MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C Static moment Mr = W x 9.8 (L3 + C) W Examine Mr.

VZ1000

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Manifold Specifications

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Made to Order

L1 With coil scraper: C(D)Q2D-XC26C35 Spatter resistant specification for arc welding: CDQ2D-XC26C88/C89/C91 Th9 L2 (L) (A + Stroke) [mm] Bore size Stroke range XC35/XC91 XC88/XC89 A L L1 L2 Th9 A L L1 L2 Th9 Without magnet for auto switch Built-in magnet for auto switch Built-in magnet for auto switch 32 50 or less 116 126 51 33.5 5 23 0 0.052 131 56 38.5 10 23 0 0.052 75, 100 126 40 50

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

REA/REB

Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data L2 L1 2.

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

S070

-Outside Local Area: (800) 258-9200-www.stevenengineering.com R1.7 7 25.5 3.4 28.5 VT 3.5 150 (Lead wire AWG#26) 27 VP 5 150 (Lead wire AWG#26) ~ = VG 3.5 VP ~ = ~ = S070 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (Non-locking) 2-Rc 1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A

3 Port Solenoid Valve Series VQ100 1

= 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) M plug connector (M) (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 56 Indicator light 59.5<64.5> 300 66<71> Indicator light (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 50 P R 3 1 P R 3 1 < >: AC < >: AC Formula L1 = 10.5n + 9.5 L2 = 10.5n + 22.5 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17