SYJA300

hole) 20 12 23 15 1/8,1/4 (P , R port) 48 1797

VHS

Refer to p. 0-33 to 0-36 for Safety Instructions and common precautions. !0 !0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

PSxx-PSV0007

lock 0x0 Refer to P.4 Device Lock 0x0010 (16) 0 R Vendor name SMC Corporation 0x0011 (17) 0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name e.g.

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

Direct Operated

absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric.

NCG/CG1

The minimum stroke with rod boot is 20 mm. 74 Air Cylinder: With End Lock Series CBG1 Air Cushion Type: CBG1BA Stroke Bore size H Bore size Rod end lock: CBG1BA Stroke R Head end lock: CBG1BA WA WB 2-P W 10 Max.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

Vacuum Unit Ejector / Vacuum Pump System

R Supply valve: Self-holding release valve linked, Release valve: N.C.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

Cylinder

F UJ ' r-, ~\\ _ \. / r\ o .-: . <-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

Non-contact Gripper

L) XT661-4A-(R, L) XT661-2A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 P.C.D.

3 Port Solenoid Valve Metal Seal Series VZ200 1

20 20 stations Rc 1/4 Built-in One-touch fittings Applicable tubing O.D. 6 C6 Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-7 Series MGC Allowable Tip Load and Deflection Slide bearing MGCMl20-R Stroke MGCMl25-R Stroke MGCMl32-R Stroke MGCMl40-R Stroke MGCMl50-R Stroke 3.20-8 Compact Guide Cylinder Series MGC Allowable Tip Load and Deflection Ball bushing bearing MGCLl20-R Stroke MGCLl25-R Stroke MGCLl32-R Stroke CL MLGC CNA CB CV/MVG CXW CXS

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Model VHS4510 VHS4510-06 VHS5510 1 (P) 2 (A) 3/4 1 1/4 3/8 1/2 3/4 Port size 1/2 1/2 3/8 3 (R) 77 1 (P) 2 (A) 27 82 125 38 55 Effective area (mm2) Push the handle and then turn. Double action construction prevents erroneous operation. 49 2 (A) 3 (R) 36 42 40 50 53 0.77 0.42 Mass (kg) 0.36 Combination with modular type FRL is possible.

CC-Link-E

S. ) Bi t dat a area O u tp u t b i t d ata Bi t dat a area In p u t b i t d ata R Y00 to R Y0B Set val ue of hol di ng pressure f or error N ot e R X00 to R X0F U nused R X10 to R X19 I nval i d ( area of syst em ) RY0C, RY0D U nused RX1A Fl ag f or error RY0E Banned f or use RX1B Rem ot e READ Y R X1C to R X1F I nval i d ( area of syst em ) RY0F 0: RY00 t o RY0B i nval i d dat a 1: RY00

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

PFxx-OMA1007

regulator type NC Specification AMS20/30/40/60A-R/N/F#C Part number P A B C D E J M L AMS20A-#C 1/8 1/4 274.3 214.7 81.7 134.4 25.6 46.2 24 40.1 AMS30A-#C 1/4 3/8 291.8 214.7 87.9 134.4 29.1 46.2 30 40.1 AMS40A-#C 3/8 1/2 334.8 214.9 92.4 151.6 32.6 46.2 36 40.1 AMS60A-#C 3/4 1 401.8 214.8 93.7 151.6 42.1 46.2 46 40.1 Dimensions with bracket Part number K F G H Q R S T U V W AMS20A-#C