Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

AC Servo Motor Driver (Pulse input type/Positioning type ）

/symbol/ Setting mode digit Function name [unit] P S T PE01 *FCT1 _ _ _ x Do not change this value. 0h _ _ x _ For manufacturer setting 0h _ x _ _ 0h x _ _ _ 0h PE03 *FCT2 _ _ x x Do not change this value. 03h _ x _ _ For manufacturer setting 0h x _ _ _ Do not change this value. 0h PE04 *FBN Do not change this value. 1 5 60 5. PARAMETERS Control Initial value No.

180

depth 3 0 5 4 7 4 x M4 x 0.7 thread depth 8 (Mounting thread) 2 x M4 x 0.7 thread depth 8 (Limted area for mounting attachment) 14 (Mounting thread) 2 x 4.5 through (Mounting hole) 30 38 28 28.5 30 20 17H9 + 0.043 depth 1.5 0 41 Positioning pin hole 2.5 12 55.5 20 69 Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) 18 8 3 4 25 7 M5 x 0.8 (Finger closing port) 2.5 MHY2

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

Slider Type/Ball Bushing Bearing

J 2 x M5 x 0.8 Hollow shaft for piping Auto switch mountable 4 x MM Depth M Depth JK 4 x LD 4 x Counterbore dia.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 Up to 300 301 to 1500 (mm) Female rod end With air cushion (mm) ZZ Stroke range ZZ Bore size Bore size GA RA S WA WH A1 MM H Rubber Air Standard Long 22 26 26 205 242 242

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

(mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation: Red (+) EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8

MXH Series Compact Slide

78 40 4 30 30 78 40 30 4 40 88 50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34

KB

1 14 14 13.6 17 17.0 6 M14 x 1 17 17.6 18.5 21.0 18.5 21.0 M16 x 1 M20 x 1 M16 x 1 M20 x 1 19 24 19 24 8 10 8 10 Applicable tubing 22 25.2 18.5 Mounting plate thickness 7 mm or less 22.0 12 M22 x 1 24 27 18.0 27.0 15-2-114 Piping Module Series KB Air Supply Port 2 Male Connector Socket: KBB H (width across flats) T Weight (g) Model D L1 L2 A Connection thread M5 x 0.8 M6 x 1 Rc Rc KBB1-M5

LEC-OM07605CN

PF25 SEMI-F47 (Tough Drive)] [AL.10.1] 0h x _ _ _ 0h PA21 *AOP3 A-3 _ _ _ x 0 1 0(MR Configurator2) 1h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA22 **PCS _ _ _ x 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0 1 2 [AL.37 ] 0h 5 19 5. [] PA23 DRAT _ _ x x 0 0 00h x x _ _ 0 0 00h [AL.50 1]5000 [AL.50.3 4]5003 PA24 AOP4 A-4 _ _ _ x 0 1: 3 2 23(_ _ _ 1) (_ _ _ 2)) 2 3 3 0h _ _ x _ 0h _ x _ _ 0h x

9.8

M5 x 0.8 21.4 10.2 6 Digital Pressure Switch Series ZSE10(F)/ISE10 Panel fitting dimensions 57.2 0 0.4 14.8 0 0.4 4 x R2 or less 57.2 0 0.4 28.8 or more (Rear ported) For side ported models, dimensions differ depending on the fittings and tubing. 14.8 x n pcs. + 3 x (n pcs. 1) 4 x R3 or less ZSE10(F)/ISE10 M5 R With DIN rail The DIN rail needs to be prepared by the customer. 6.4 M5 x 0.8

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Compact Guide Cylinder Series MGQ

74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50 M4 x 0.7 7 12 25 62 38 42 7 54 M5 x 0.8 8 13 2.5 5.5 30 72 46 52 10 64 M5 x 0.8 8 13 2 4 38 86 56 62 10 76 M6 x 1.0 9 14 2 2 MGQM (Slide

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

reduces flow setting time

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assenbly SY100-77-1A VZ P R 20 stations 20 R port VS A port M5 X 0.8 P port M3 X 0.5 M5 X 0.8 M5 X 0.8 Note 1) SY114 (A) and SY124 (A) cannot be mounted on the same manifold.