New

, are Nil, A, B, D, E, Z. 3 Available for air and water. 270 IN OUT C 3 A 3 A 6 D 1 Available for the VXZ A to 2 .

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

Compressed Air Cleaning Filter Series

10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28 66 5 2 1/4, 3/8 103 18 98 90 5 90 10 150 80 28 8 7 7 14 7 12 50 95 34 80 5 2.3 3/8, 1/2 132 49 Super Mist Separator Series AME Dimensions AME450C/550C P D Q T R E D N F L U Bracket (Accessory) O J K M V W B IN OUT C I A G Maintenance space H (mm) A Model Port size Bracket related dimensions B C D E F G H I 172

5 Port Solenoid Valve SY Series

In common EB P EA SY7 40 Type 43 Stacking type Individual wiring SY9 40 + + + + P. 89 Manifold stations can be increased. Type 43P Stacking type Flat ribbon cable SY9 40 P. 103 Manifold stations can be increased. In common Type 45 Stacking type/DIN rail mounted Individual wiring SY3 40 SY5 40 + + + + + P. 115 Stations can be increased on the DIN rail.

Compact Type

Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6, 10 Auto switch model Bore size Operating range B D (mm) 6 5 10 6 15 6 20 7.5 25 8 32 9 D-A9, A9V D-F9, D-F9W D-F9V, D-F9WV, D-M9 2.5 3 3 5 5 4.5 D-F9BAL D-M9 2.5 3.5 5 2 2.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6 122.2 [126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63

New

C D K J K J I Q z 300 1/4 Exhaust port I Q z 300 1/4 Exhaust port R 12.5 S R 12.5 S L L H E U H E U F F G 2 x P 2 x P G Port size Port size DIN terminal A B C D J K Q T I Cable 6 to 12 S 12.5 R 1/4 Exhaust port (44) U F G1/2 E H L G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Grommet Grommet (with

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position for Stroke End Detection CXSJ6, 10 Auto switch model Bore size Operating range B D (mm) 6 5 10 6 15 6 20 7.5 25 8 32 9 D-A9, A9V D-F9, D-F9W D-F9V, D-F9WV, D-M9 2.5 3 3 5 5 4.5 D-F9BAL D-M9 2.5 3.5 5 2 2.5

Series CE1

D-F7lWV types are not compatible with Z (5m) products. The standard cable length for F7BA, F9BA and F7NT is 3m.

HRX-OM-W002

1000 40 1000 1000 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Auto switch type D-A3, A4 D-G3, K3 D-B5, B6 D-G5, K5 D-A5, A6 D-F5, J5 Cylinder bore size (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Model 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 32 25 to 800 32 40 50 63 80 100 32 40 50 63 80 100 32 40 50 63 80 100 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 BAF-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

2–4

D-P5DWL type: 40 and 50 only available.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

Rotary Table/

D. (mm) I. D.

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

155

D-M9NA D-M9BA D-M9PA Auto switch model In-line In-line In-line Electrical entry direction 3-wire 2-wire Wiring type NPN PNP Output type 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less 2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or

Compact Cylinder with Air Cushion Series RQ

x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -