Flow Control Equipment

min(ANR)) 08, Flow (l/min(ANR)) 0.2 1.0 Flow (l/min(ANR)) 06, 2 50 10 100 ASS 0.1 0.5 1 5 0 0 5 10 0 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) Note) "-U10/32" is the same as "M5".

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

VP300/500/700

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With

Soft Start-up Valve

model 30 13.1 7.4 Up to 50% shorter 40 19.2 12.2 50 (Port size 3/4) 34.8 22.6 AV2000-A New New Fill time 50 (Port size 1") 41.3 24.4 Current model For 1(P) R 2(A) Improved adjustability at low speed air supply Needle Valve Flow Rate Characteristics Inlet pressure: 0.5 MPa 400 Air flow rate [L/min (ANR)] 350 Current model 300 250 200 New New AV2000-A 150 100 50 0 0 1 2 3 4 5 6 Number of needle

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

JXCx-OMT0028CN

) (1-145) RESET SVON D (1-146) RESET SVON D (C24V) (1-147) RESET SVON D 63 - (1-148) RESET SVON D (1-149) RESET SVON D () (1-150) RESET SVON D (1-192) E ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l SYJ524-l SYJ524M-l How to Order SS3YJ5--40-05 -M5 R Port

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

ITV

Output deviation factor (% F.S.) 20 0.5 30 Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 100 80 60 40 20 50 100 150 Flow rate (l/min(ANR)) VAC side pressure (Supply pressure) (kPa) 14-8-31 32 Dimensions ITV2090 Note) Do not attempt to rotate the cable connector, as it does not turn.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

HRX-OM-X071

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Multi-Axis Step Motor Controller

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) 1 2 Cable length (L) [m] 15 16 Connector B Connector D (14.7) (30.7) L (11) 1 1.5 3 3 5 5 8 8*1 (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C A 10*1 Actuator side (Terminal no.)

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

PA3000/5000/PAX1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Flat type/CJ-CF MM Double clevis type cylinder A 7 TH 4-TC C0.5 +0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N W L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

L M L CXTM L Series Action Double acting/Single rod Double acting CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25

Title not found

Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.