D-F6N/D-F6P/D-F6B

15 mm 30 mm 90 mm Connector Specifications Auto switch model D-LC50 5 m Nil M L Z N1) SAPC MAPC SBPC MBPC SDPC MDPC LDPC M8-3 pin Plug connector M8-4 pin Plug connector M12-4 pin A code (Normal key) Plug connector :Standard :Produced upon receipt of order (Standard) 1) Applicable to the connector type (D-C) only. 2) Applicable to the D-M9 (V), D-M9W (V), and D-M9A (V) only. 3) Applicable

Suction Guard (Produced upon receipt of order) FHG Series

150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed Connection part dimensions/ Companion flange Female threaded companion flange L-type block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

PF-OMN0009_C

60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59 36 48 58 70 7 2 -

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Ejector Valve Unit, Series ZYY/ZYX

Manual override Non-locking push type Nil D E Push & turn locking type, screw driver operated Push & turn locking type, manually operated Light/Surge voltage suppressor For electrical entry types G, H, L, M Without light/surge voltage suppressor With surge voltage suppressor Note 2) Nil S Z R U With light/surge voltage suppressor With surge voltage suppressor (non-polar type) With light/surge

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Digital Flow Switches, Series PF2A, Series PF2W

Pin description 40 2-Port size 44.5 30 1 DC(+) 50 2 OUT2 3 DC() 4 OUT1 (41.5) 73 Flow direction 6 Series PF2A to are terminal numbers.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043

AC Servo Motor Driver (Pulse input type)

(Note 8) 33 OP Encoder Z-phase pulse (open collector) 1 P15R SD Plate 10m max. (Note 7) 2m max.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

PSxx-OMS0006CN

<> [F80] [F80] 30 () [ECo] (ON) ON OFF -42No.PS-OMS0006CN-G [F81] <> [F81] [oFF]() () (000) /(53 ) [FAL] 3[nG] -43No.PS-OMS0006CN-G /(53 ) 1 () 1 [F81] 30 -44No.PS-OMS0006CN-G [F82] [F10]2[dUAL][LinE] <> [F82] () ( ) AbY(Z)019 () / 1 () [F82] () QXZ((/)(*)) () A~Z <> -45No.PS-OMS0006CN-G [F90] <> [F90] [on] [oFF]() [oFF]() 2 [F90] 47 -46No.PS-OMS0006CN-G

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

+ Semi-standard Nil R Flow direction d Flow direction: Left to right Flow direction: Right to left + Pressure Control Equipment Nil Y Knob e Downward facing knob Upward facing knob + Nil Z Note 5) ZA Note 6) Pressure unit f Name plate and pressure gauge in imperial units: MPa Name plate and pressure gauge in imperial units: psi Digital pressure switch: With unit conversion function Note 7

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

+ Semi-standard Nil R Flow direction d Flow direction: Left to right Flow direction: Right to left + Pressure Control Equipment Nil Y Knob e Downward facing knob Upward facing knob + Nil Z Note 5) ZA Note 6) Pressure unit f Name plate and pressure gauge in imperial units: MPa Name plate and pressure gauge in imperial units: psi Digital pressure switch: With unit conversion function Note 7

3 Port Solenoid Valve Series SYJ300/500/700

S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

Compact End Lock Cylinder Series CBQ2

M Z E K 2P (port size) M Q Q End lock mechanism dimensions (mm) B + Stroke L J E Bore size (mm) HN (Max.)

JSY1000/3000/5000 Series (Non Plug-in)

Dimensions are completely the same as D type DIN connector. 3.

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.