Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: L [-30 in.Hg to 60 psig (-0.1 to 0.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

Inlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Outlet: L [-30 in.Hg to 60 psig (-0.1 to 0.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: L [-30 in.Hg to 60 psig (-0.1 to 0.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: L [-30 in.Hg to 60 psig (-0.1 to 0.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: L [-30 in.Hg to 60 psig (-0.1 to 0.4 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard

Size: 30, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: C [N.C.

Size: 30, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: C [N.C.

Body Size: 30, Thread Type: N (NPT), Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: w/o Auto Drain, Bowl: Sizes 20, 30, 40: Polycarbonate Bowl; Sizes 50, 60: Stainless Steel, Drain Port: w/Drain Cock, Indicator: L (w/Element Service Indicator), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in Imperial

tTV2000/3000

Note 3) The minimum unit for 1ry205 is l PSl I'relerre# i.rirfilri:: i'fiprafi: How to Order Model Pressure 0 Current WDe 4 to 2OmA Cunent type 0 to 20mA 2 Voltaoe tvpe 0 to SVDC 3 Voltaoe tvoe 0 to 1oVDC connector type S : l Straioht tvDe 3m L Right angle type 3m N Without cable connector d Preset input Monitor output Option (bracket) Thread type Port size 2 114 (2OOO,3000 type) 3 3/8 (2000

VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration

VFN Series VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration How to Order 3-way solenoid valve configuration (for Single acting actuator) VFN2120N 5B 02 N X36A Left side port operation Right side port operation C-TYPE A-TYPE NAMUR interface 3 port/5 port A 3 port Port #4 on Coil side B 5 port Port #2 on Coil side C 3 port Port #2 on Coil side D 5 port Port #4 on Coil

Table of Contents

MDHR2-10/15 MDHR2-20/30 D20H H L L Auto switch of D-M9 is used. When auto switch D-M9V is used. Auto switch of D-M9V is used. (mm) Max. Protrusion of Auto Switch from Edge of Body: H Max.

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Made to Order

-XC13 (mm) D-F7BA/F7ABV D-A72/A7H/A80H D-A73C/A80C D-M9/D-M9V D-M9W/D-M9WV D-M9A/D-M9AV D-F7/F79F/F7V D-J79/J79C D-F7W/J79W/F7WV D-F7NT D-A7 D-A80 D-A79W Auto switch model A B A B A B A B A B 20 31.5 22.5 (30.5) 30.5 21.5 (29.5) 35.5 26.5 (34.5) 30 21 (29) 27.5 18.5 (26.5) 25 31 23 (31) 30 22 (30) 35 27 (35) 29.5 21.5 (29.5) 27 19 (27) 32 32.5 23.5 (31.5) 31.5 22.5 (30.5) 36.5 27.5 (35.5)

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

ISO Cylinder

Solid state D-F79, D-F7P, D-J79, D-F7NV, D-F7PV, D-F7BV, D-J79C, D-F79W, D-F7PW, D-J79W, D-F7NWV, D-F7BWV, D-F79F, D-F7BA, D-F7BAV, Reed D-A72, D-A73, D-A80, D-A72H, D-A73H, Auto switch mounting screw (M3 x 0.5 x 8 L) D-A76H, D-A80H, D-A73C, D-A80C, D-A79W L How to Mount and Move the Auto Switch Auto switch 1.

CV/MVGQ

(Not mountable after the time of shipment) Auto Switch Mounting Height D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44 D-A44C D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV D-A5 D-A6 D-A59W Bore size (mm) Hs Hs Ht Hs Ht Hs Ht Hs Hs Ht Hs Hw Hs Hw Hs 40 38 40 31 38.5 31 30.5 30 72.5 73