Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -

Cooling Capacity: 100, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: None, Option 2: SI Unit Only

Cooling Method: Air-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option: Applicable to Deionized Water Piping

Cooling Method: Air-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option: w/Automatic Fluid Fill Function

Cooling Method: Air-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option: SI Unit Only

Cooling Capacity: 38 kW, Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, with Rc-NPT Conversion Fitting, Power Supply: 50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC, Option: w/Fluid Fill Port

Cooling Capacity: 38 kW, Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, with Rc-NPT Conversion Fitting, Power Supply: 50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC, Option: Applicable to Deionized Water Piping

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+K+M

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+D+K+M

Cooling Capacity: 400 (38 kW), Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, with Rc-NPT Conversion Fitting), Power Supply: 46 (50/60Hz: 3-phase 380 to 415 VAC; 60Hz: 3-phase 460 to 480 VAC), Option: Option Combination A+D

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

LECP6_C

ABS 3 NC 1 mm/s mm + 1 mm/s 2 1 mm/s 2 100% 1 0 1100 1~100 INP ON 1 INP ON 29 - 1~100 1 mm/s mm/s 1 AREA ON 1 1122 1 + AREA ON 112 2 2 1=2=0 AREA OFF + mm mm INP ON INP ON 1 INP ON INP ON 1 30 - 72 () ID ID 132 ID () IO IO 64 S S + mm (+) (+) 1 mm (-) (-) 1 mm/s 1 1 mm/s 2 1 INP mm 1 31 - mm 0mm 0mm 100mm 1 100mm (+) (-) 1 12 1. +(++) 2. (+)

ZISE20A.eng

Panel mount adapter (Part No.: ZS-46-B) Panel mount adapter + Front protective cover (Part No.: ZS-46-D) psi P ZSE20A(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZISE20B.eng

[F 1] Setting of OUT1 Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) Measurement mode screen Item Default setting To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly.

ZISE20B-L.eng

[F 1] Setting of OUT1 Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) Measurement mode screen Item Default setting To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly.

LFE-OMY0008

0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE

JXCx-OMT0028CN

220239 ID1 240249 250253 254,255 / JOG(-) ON OFF FLGTH ON JOG(-) /INP OUT0~5 OFF/ INP OUT0~5 ON JOG(+) + FLGTH JOG(-) JOG(+)/ ON ON OFF 43 - / JOG *1 /(mm/s) 2) JOG *1 /( mm/ s 2) JOG *1 /( mm/ s JOG *1 /() 1 (mm) *1 PLC 8,16,32 8 8 )100%GW [OUT Data]Address.1620mm/sAddress.17 20mm/s 16 14h 10%100%1016 0Ah PLC 16 16 )100mm/s GW [OUT Data]Address.4-Address.5 Address

CJP

15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 Varistor Varistor S Coil Coil 12 VDC or less There are manual overrides in 2 directions, on the top and on the side (solenoid side).