SMC Corporation of America
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7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

(0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.

t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa Power supply voltage 0 to 10 VDC Thread type 1/8 (1000 tuoe) 2 1/4 (1000

3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

wire length) 82.5 Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129 7 123 145 8 139 161 9 155 177 10 171 193 Symbol L1 L2 4-15-9 10 3 Port Solenoid Valve Metal Seal Series VZ400 Model Large flow capacity Low power consumption: 1.8 W (75 mA, 24 VDC) Plug connector One-touch wiring of plug connectors Common pilot exhaust subplate mounted and

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Digital Flow Switch Series PF2A/PF2W For Air/Water Description Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 11 Remote Type/Display Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 q q w t r SMC FLOW SWITCH w U P e SET e UNIT y RESET OUT2 OUT1 SET u DOWN t y u r RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously, the RESET

Applicable bore size (mm) 40 50 63 80 100 Z C HW H H T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 44 52 64 78 92 69 77 91 107 121 57 58 60.5 64 67 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 M5 x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 1590 2-Color Indication Type Solid State Auto Switch Direct Mounting

10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53 1/2 3.55 0.39 1.46 1.98 AFF-EL8B 8.87 AFF11B-N06C-T 73 3/4 4.18 0.39 1.46 3.09 AFF-EL11B 10.2 AFF22B-N10C-T 123 1 4.8 0.39 1.46 4.63 AFF-EL22B 14.22 AFF37B-N14D-T 212 1 1/2 6.3 0.39 1.46 9.26 AFF-EL37B 18.64 AFF75B-N20D-T 424 2 8.67 0.39 1.46 23.15 AFF-EL75B 18.64 AFW675-N20-E1 675

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC Command signal IR 12 VDC 10%, 24 VDC 10%, 1.8 W or less Power supply Electrical entry DIN terminal VEX Applicable cable Cable O.D. 4 to 6.5 When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa) Bleed air flow AMR Installation Universal

Bore size (mm) 10 15 25 10 15 25 Auto switch Nil Without auto switch Refer to the table below for auto switch model numbers.