Compact 5-Port Solenoid Valve SUP/EXH (Common for the 3/5 port) Valve stations 2 to 24 stations 2 to 18 stations 2 to 8 stations 2 to 24 stations 2 to 18 stations 2 to 8 stations Flat ribbon cable connector conforming to MIL-C-83503 (Refer to page 41.)
(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.
ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS
Horizontal Operation (Load, Lateral offset Lo) CEP1 CE1 Bore size (mm) Allowable load weight WA (kg) Lo: Distance from mounting surface to load center of gravity (cm) 12.0 4 + 2 (2.2 + Lo) sin 36.4 5.2 + 2 (2.7 + Lo) sin 74.4 6.2 + 2 (2.9 + Lo) sin 140 7 + 2 (3.4 + Lo) sin 258 8.6 + 2 (4.2 + Lo) sin 520 10.4 + 2 (5.1 + Lo) sin CE2 10 15 ML2B 20 C J G5-S 25 Lo: Distance from mounting surface
RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !
Stopper ring Block (C) Stopper ring Block (D) Block (D) Block (C) Counterclockwise
Note 2) ( ): denotes without sub-plate. 10-SY5000 Flow rate characteristics Note 1) Weight (g) Note 2) Valve model Actuation type 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size L plug connector, W M8 connector C (dm3/(sbar)) Cv b b C (dm3/(sbar)) Cv Grommet DIN terminal M plug connector 121 (58) 139 (76) 123 (61) 144 (81) 154 (92) 186 (123) 127 (65) 152 (89) Single Double 2 position 2.4
P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (
required for mounting (stations) 2 2 2 2 2 2 2 1 Porting specifications (A, B) Passage EA, EB P 10 10 stations Symbol Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common Please indicate manifold base type, corresponding valve, and option parts.
Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise
Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise
Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.
Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part
Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part
Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (