Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

200 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) 400 400 Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

LEF-OM006xx

2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm)

CNG

40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) 20 21 Series CNG Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Cylinder with Lock Series CNG

100 0.5 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

V

) Operating Pressure 2 Position Double 0.1 ~ 0.7 (14.5 ~ 100) Range MPa (PSI) 3 Position 0.2 ~ 0.7 (30 ~ 100) External Pilot 2 Position Single 0.25 ~ 0.7 (37 ~ 100) Operating Pressure 2 Position Double 0.25 ~ 0.7 (37 ~ 100) Range MPa (PSI) 3 Position 0.25 ~ 0.7 (37 ~ 100) Ambient & Fluid Temperature C / F Max 50C / 122F Max Operating 2 Position Single 10 5 Frequency Hz 3 Position 3 3 Manual

CNA

100 100 Load weight m(kg) Load weight m(kg) 63 63 63 50 50 50 50 40 30 50 40 30 MLGC 40 40 40 CNA 20 20 10 10 CB 5 4 3 5 4 3 CV/MVG 2 2 CXW 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CXS Max. speed V(mm/s) Max. speed V(mm/s) CXT Graph n Graph c 0.4MPa P < 0.5MPa 0.4MPa P < 0.5MPa 1000 1000 MX 100 100 100 500 400 300 500 400 300 80 80 80 MXU 100 100 100 63 63 63 200 200

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Table of Contents

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

CQ2

, 140 160 2.3-104 10 to 300 Long stroke 32, 40, 50 63, 80 100 Double acting Single rod CQ2 2.3-108 125 to 300 Anti-lateral load 32, 40, 50 63, 80 100 Double acting Single rod CQ2S 32 to 40/5 to 100 50 to 100/10 to 100 2.3-118 Clean series (Bore 12 to 63) Air-hydro (Bore 20 to 100) With One-touch fitting (Bore size 32 to 63) Foot and flange Double clevis Copper free Applicable Auto Switch

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Table of Contents

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

MY1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load