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After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). 4 Snap shot function The current flow rate value can be stored to the switch output ON/OFF set point.

100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 9.

100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 9.CN2TB/PC Power supply connector for usage.

BBA1: D-A5/A6/F5/J5 D-F5BAL switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, BBA1 screw is attached.

2 Air flow capacity (Series IDFS) Data D-1 Air flow capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E Model IDUS3E IDUS4E IDUS6E Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 Features 1 Stainless Steel Heat Exchanger Type Series IDUS 3E, 4E, 6E How to Order Voltage Model Options 3E 4E 6E 4 6 A C L IDUS M R Model Air compressor Refrigerant Voltage

2: Air Flow Capacity (Series IDFS) Data D-1: Air Flow Capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E IDUS3E IDUS4E IDUS6E Model Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 14-18-2 3 The models IDF1E to 11E and IDU3E to 6E have been revised.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Contact SMC when there is a problem of switchs ON/OFF positions (hysteresis). -7No.D-S-OMZ0004 Model Indication and How to Order D-M7BA Lead wire length and termination 2-wire Symbol Specification L 3000 mm (Half strip) Z 5000 mm (Half strip) SAPC 500 mm (M8 3-pin pre-wire) SBPC 500 mm (M8 4-pin pre-wire) SDPC 500 mm (M12 4-pin pre-wire) MAPC 1000 mm (M8 3-pin pre-wire) MBPC 1000 mm (M8 4

(mm) Shim thickness (mm) 0.3MPa 0.3MPa Recommended shim thickness Recommended shim thickness 0.5MPa 0.5MPa 0.7MPa 0.7MPa 8 - 63 Arm length L100mm Arm length L150mm 4000 4000 Peak clamping force position Peak clamping force position 3500 3500 3000 3000 0.7MPa 0.7MPa Clamping force (N) Clamping force (N) 2500 2500 2000 2000 0.5MPa 0.5MPa 1500 1500 0.3MPa 0.3MPa 1000 1000 500 500 0 0 0 0.5

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (DC24V 0V ) Ry EMG+ Ry EMG

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-15 3 Series ASD Dimensions: Metric Size ASD330F/430F ASD530F/630F ASD230F Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M L2 L3 M D2 D2 L1 L1 L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9