CYP

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

VFS

2n-Rc , 3 8 1 2 Pilot valve manual override Double check spacer U side Individual SUP spacer Air release valve Pressure switch Air release valve Pressure switch Stations Outlet for check Air filter regulator D side 105 Control unit Rc 3/4 (Po port) 209.5 n: Stations Pilot EXH port: PE 2-Rc 1 8 Stations 4 5 6 7 8 9 10 Formula L1 = 43 x n + 70 3 199 211 L L1 L2 L3 (MP) L3 (AP) 242 254 428.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

9 16 32 VQZ 17 4 VQD 10 4 10 P = 11 L2 36.5 41.5 L1 45 M plug connector (M) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11 138 130 19 226 218 2 39 31 3 50 42 4 61 53 10 127 119 9 116 108 5 72 64 8 105

F

D L *A M Nylon M5x0.8 KXH04-M5 8 38.5 35 11 4 10.4 16 2.5 4.0 18 KXH04-01S 12 40 36 16 18 KXH06-01S 41.5 38 20 6 14 12.8 17 4 13.4 14 KXH06-02S 44 39 26 18 KXH08-01S 46 42 28 14 KXH08-02S 49 43 34 8 17 15.2 18.5 6 26.1 42 38 KXH08-03S 50 44 14 KXH10-02S 58 52 68 38 KXH10-03S 59 52 76 10 22 18.5 21 7 36.3 12 KXH10-04S 62 53 94 38 KXH12-03S 60 54 88 12 24 20.9 22 8 46.1 12 KXH12-04S 63 55 105

Low Friction Cylinders Series MQ

+ Stroke M6 x 1 M8 x 1.25 16 to 22 7 105 + Stroke : Stroke D-X Individual -X 1175 Series MQQ Dimensions Standard type (Through hole & Double end tapped): MQQTB 10, 16, 20 2 x M5 x 0.8 H effective thread depth C 2 x 4 x OA effective depth RA 2 x 4 x OB Depth of counterbore RB Q Y F I 4 x N through 0.2 D E M B + Stroke L K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y

Thomas Oil-less WOB-L Piston Compressor Flow Rate: 3.68 CFM / 105 LPM , 3.68 CFM / 105 LPM, Max Pressure: 120 PSIG / 8.3 bar , 120 PSIG / 8.3 bar, Horsepower (60 Hz): .75, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Net Weight: 16 lbs. / 7.3 Kg Series Configured Datasheet.

Air Slide Table Series MXP

state auto switch (2-wire, 3-wire) Auto switch MXJ +1 0 mm Stroke length tolerance Theoretical Output MXP (N) MXY MXP16 Operating pressure (MPa) Bore size (mm) 6 8 10 12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Standard Stroke Mass (g) (mm) Body mass 80 105

Large Size Vacuum Module: Series ZR

(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Air Slide Table Series MXW

8H9 + 0.036 0 depth 9 MXQ 8H9 + 0.036 0 depth 9 8 x M6 x 1 thread depth 18.5 Note) 9 MXF (Insert) MXW 98.6 62 126 MXJ MXP 50 37 Y 50 Y 50 MXY L 209 MTS 28 K 14 28 A 76 A 38 Z Through-hole 6.6 N x M8 x 1.25 thread depth 16 (N-1) x H G GG HH H 9 8H9 + 0.036 0 depth 9 NN x M8 x 1.25 thread depth 16 Through-hole 6.6 8H9 + 0.036 0 depth 9 E F (mm) G F E J GG HH H NN Z N L K Model DMXW25-175 105

Escapements Series MIW/MIS

144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16 2H9 0 +0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 4 15 M3 x 0.5 7 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 4.5 19 M3 x 0.5 9.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?