Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Type Rubber bumper, 20 to 100 Air cushion, 40 to 63 N A Nil Built-in magnet Clean series 10 11 Relief type Vacuum suction type No D With auto switch (Built-in magnet) Bore size (mm) 10 C D G 1 B N 40 150 Z M9BW 21 C D G 1 B N 40 150 Z M9BW Mounting Cylinder stroke (mm) B Auto switch Number of auto switches Basic Axial foot Rod

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Series NCA1

Mounting B MX0 Basic L MS1 Foot F MF1 Front Flange G MF2 Rear Flange R MS4 Side Tapped D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Bore Size 150 200 250 325 400 1.5" 2" 2.5" 3.25" 4" Nil S n Nil J K No. of Switches 2 Pieces 1 Piece "n" Pieces For larger bore

AC Servo Motor Driver (Pulse input type)

Changing PD04 from 00212100 to 0021210D 0 D 41 - (2) Symbol allocation using the setup software: Changing pins CN1-16 to Gain changing selection (CDP). Change PD04 from 00212100 to 0021210D in the I/O tab. Select Single Axis Write. Cycle the power the parametersto be enabled.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) 1 Direct Operated Precision Regulator/Modular Style Series ARP20 to ARP40 Series ARP20K to ARP40K Direct Operated Precision Regulator with Backflow Function/Modular Style ARP40/ARP40K ARP30/ARP30K ARP20/ARP20K Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Speed Controller with

RoHS Made to Order How to Order 2F 12 400 AS Lubricant: Vaseline -X12 Ex.) AS2002F-04-X12 Applicable tube O.D. Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Air Cooled Aftercooler Series HAA 1

70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

Mounting: F (Front Flange), Bore Size: 50mm, Thread: TN (NPT), Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Mounting: L (Axial Foot), Bore Size: 50mm, Port Thread: TF [G (25~80)], Coil Scraper: Without, Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Magnet: D (Built-in), Mounting: F (Front Flange), Tube Material: Aluminum Tube ø125~ø160, Steel Tube ø180~ø300, Bore Size: 125mm, Port Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Piping: Standard, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Magnet: Built-in, Mounting: Center Trunnion, Bore Size: 63mm, Stroke: 400mm, Rod Boot: Single Rod, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Basic, w/o Bracket, Bore Size: 32mm, Stroke: 400mm, Rod Boot: Single Rod, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Piping: Standard, Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Front Flange, Tube Material: Aluminum Tube ø125~ø160, Steel Tube ø180~ø300, Bore Size: 125mm, Port Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Mounting: Front Flange, Bore Size: 50mm, Thread: NPT, Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -