Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

VM

D.

13

Effective area of tubing Effective area of tubing from graph below Tubing O.D. 9 V x 60 Q Adsorption response time T1 = Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) T1 : Arrival time to 63% of last vacuum pressure Pv T2 : Arrival time to 95% of last vacuum pressure Pv Q1: Average adsorption flow l/min (ANR) D : Piping diameter (mm) L : Length from

3 Port Solenoid Valve Metal Seal Series VZ200 1

For lead wire length (1000 mm) Solenoid valve: VZ2150-5M0-015 pcs. Connector assembly: DXT170-80-4A-105 pcs. Crimping the Lead Wire and Socket Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping part.

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Fieldbus system (CC-Link compliant)

Output: 32 OFF ON ON 8 points for each 8 points for each of A to D of A to D 2.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

SI Unit for Vacuum Manifold

Fieldbus interface connector BUS OUT/Port2: M12 4 pin socket D-coded (Port type: MDI-X) No. Designation Content 1 RD+ Receive Data + 2 TD+ Transmit Data + 3 RDReceive Data 4 TDTransmit Data BUS IN/Port1: M12 4 pin socket D-coded (Port type: MDI) No. Designation Content 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Fig. 2-1.

Digital Pressure Switch

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

AR20-B to AR60-B

1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow

Fieldbus system (DeviceNet compliant)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

ASR

) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

AC Servo Motor Driver (MECHATROLINK-III type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Solid state auto switch

current) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Operating time 1 ms or less Indicator light Operation range red LED Electrical entry type Grommet Lead wire Oilproof heavy-duty vinyl cord 2.7 x 3.2 oval, 0.15 mm2, 2-wire (D-F6B), 3-wire (D-F6N,D-F6P) Insulation resistance 50 M or more under the test voltage 500 VMDC (between case and cable) Withstand voltage 1000

Series HAW Water Cooled Aftercooler 1

300 1000 3300 5700 8600 12000 18000 150 700 2500 5000 7000 10500 14000 2100 4300 5600 8000 11000 AM Misc.

Digital Flow Switch (Manifold type)

(No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Digital Flow Switches Series PF2A

(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.