Magnet: Built-In, Mounting: Integral Clevis type, Cushion: Non-lube, Rubber Bumper, Bore Size: 50mm, Thread: NPT Ports, Seal Material: NBR, Stroke: 150mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), English Rod Thread: X165US

Magnet: Built-In, Mounting: Axial Foot Type, Cushion: Non-lube, Rubber Bumper, Bore Size: 20mm, Thread: NPT Ports, Seal Material: NBR, Stroke: 25mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), English Rod Thread: X165US

Magnet: Built-In, Mounting: Axial Foot Type, Cushion: Non-lube, Rubber Bumper, Bore Size: 63mm, Thread: NPT Ports, Seal Material: NBR, Stroke: 150mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), English Rod Thread: X165US

Magnet: Built-in, Mounting: Front Flange, Style: Non-lube Air Cushion, Bore Size: 100mm, Thread: NPT Ports; M5 for Air Cushion 20 & 25 Bore, Seal Material: FKM, Stroke: 1000mm, Auto Switch: G5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), X Option: Inch Rod Thread

Magnet: Built-in, Mounting: MP2 Double Detachable Rear Clevis, Cushion: Air Cushion, Bore Size: 80mm (3.25"), Seal Material: Viton, Stroke: 400mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MP3 Single Rear Clevis, Cushion: Air Cushion, Bore Size: 40mm (1.5"), Seal Material: NBR, Stroke: 75mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MP3 Single Rear Clevis, Cushion: Air Cushion, Bore Size: 50mm (2.0"), Seal Material: NBR, Stroke: 50mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MP3 Single Rear Clevis, Cushion: Air Cushion, Bore Size: 50mm (2.0"), Seal Material: Viton, Stroke: 100mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MP3 Single Rear Clevis, Cushion: Air Cushion, Bore Size: 50mm (2.0"), Seal Material: Viton, Stroke: 200mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MF1 Front Flange, Cushion: Air Cushion, Bore Size: 63mm (2.5"), Seal Material: NBR, Stroke: 50mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: Built-in, Mounting: MS2 Side Lug, Cushion: Rubber Bumper, Bore Size: 63mm (2.5"), Seal Material: NBR, Stroke: 500mm, Auto Switch: G5BA--Solid State, Water Resist, 2 Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch)

IZx-OMX0087

800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

LEY-OM007

40 (2000[mm/s 2]) 6 17 30 18 50 50 30 60 60 [kg] 2) (3000[mm/s 2]) 2 4 8 8 16 30 11 22 43 [N] 3) 4) 5) 1438 2774 51141 63122 126238 232452 80189 156370 296707 [mm/s] 5) 15500 8250 4125 18500 9250 5125 24500 12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800

LEH_C

LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800